Study on rheological behaviors of media and material removal mechanism for abrasive flow machining (AFM) micro structures and corresponding simulations

Chemical mechanical polishing (CMP) has already become a mainstream technology in global planarization of wafer, but the mechanism of nonuniform material removal has not been revealed. In this paper, the calculation of particle movement tracks on wafer surface was conducted by the motion relationship between the wafer and the polishing pad on a large-sized single head CMP machine. Based on the distribution of particle tracks on wafer surface, the model for the within-wafer-nonuniformity (WIWNU) of material removal was put forward. By the calculation and analysis, the relationship between the motion variables of the CMP machine and the WIWNU of material removal on wafer surface had been derived. This model can be used not only for predicting the WIWNU, but also for providing theoretical guide to the design of CMP equipment, selecting the motion variables of CMP and further understanding the material removal mechanism in wafer CMP.

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Fundamental study on material removal mechanism in single-crystal germanium

Infrared Physics & Technology ◽

10.1016/j.infrared.2021.103773 ◽

2021 ◽

pp. 103773

Author(s):

Ruiwen Geng ◽

Xiaojing Yang ◽

Qiming Xie ◽

Jianguo Xiao ◽

Wanqing Zhang ◽

...

Keyword(s):

Single Crystal ◽

Material Removal ◽

Removal Mechanism ◽

Material Removal Mechanism ◽

Fundamental Study

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Study on surface integrity and material removal mechanism in eco-friendly grinding of Inconel 718 using numerical and experimental investigations

The International Journal of Advanced Manufacturing Technology ◽

10.1007/s00170-020-06528-8 ◽

2021 ◽

Author(s):

Hamed Esmaeili ◽

Hamed Adibi ◽

Seyed Mehdi Rezaei

Keyword(s):

Surface Integrity ◽

Inconel 718 ◽

Material Removal ◽

Experimental Investigations ◽

Removal Mechanism ◽

Material Removal Mechanism

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Microgrinding of Nanostructured Carbide Coatings: Ground Surface and Subsurface Damage Observations

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.304-305.276 ◽

2006 ◽

Vol 304-305 ◽

pp. 276-280 ◽

Cited By ~ 1

Author(s):

Y.H. Ren ◽

Zhi Xiong Zhou ◽

Zhao Hui Deng

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Material Removal ◽

Ground Surface ◽

Subsurface Damage ◽

Removal Mechanism ◽

Material Removal Mechanism ◽

Carbide Coatings ◽

Subsurface Layers ◽

Scanning Electron

Surface microgrinding of the nanostructured WC/12Co coatings have been undertaken with diamond wheels under various conditions. Nondestructive and destructive approaches were utilized to assess damage in ground nanostructured coatings. Different surface and subsurface configurations were observed by scanning electron microscopy. This paper investigates the effects of microgrinding conditions on damage formation in the surface and subsurface layers of the ground nanostructured WC/12Co coatings. And the material-removal mechanism has been discussed.

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Material removal mechanism of copper chemical mechanical polishing with different particle sizes based on quasi-continuum method

Friction ◽

10.1007/s40544-017-0142-1 ◽

2017 ◽

Vol 5 (1) ◽

pp. 99-107 ◽

Cited By ~ 4

Author(s):

Aibin Zhu ◽

Dayong He ◽

Shengli He ◽

Wencheng Luo

Keyword(s):

Chemical Mechanical Polishing ◽

Material Removal ◽

Mechanical Polishing ◽

Particle Sizes ◽

Removal Mechanism ◽

Material Removal Mechanism

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The Research and Development on the Material Removal Mechanism of the Ultrasonic Cutting

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.1027.40 ◽

2014 ◽

Vol 1027 ◽

pp. 40-43

Author(s):

Yan Yan Lou ◽

Yan Zhang ◽

Ying Gao ◽

Jia Chen Zhang ◽

Yan Zhou Sun

Keyword(s):

Material Removal ◽

Development Trend ◽

Ultrasonic Machining ◽

Removal Mechanism ◽

Rotary Ultrasonic Machining ◽

Material Removal Mechanism ◽

Material Removal Model ◽

The Development Trend ◽

Removal Model ◽

Ultrasonic Cutting

Ultrasonic machining is an important part of modern processing technology which is adapt to all kinds of hard brittle materials processing. This paper reviews the latest progress of the material removal mechanism on one-dimensional ultrasonic machining, two-dimensional ultrasonic machining and rotary ultrasonic machining, and expounds the development trend of establishing the material removal model of the ultrasonic machining.

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