Analysis of Micro/Nanoscale Mechanical Properties of Monocrystalline Germanium Using Finite Element Method and Nanoindentation Experiment

The finite element method and nanoindentation experiment are used in this paper, to analysis mechanical properties of monocrystalline germanium on micro/nanoscale. The cloud charts of stress and strain distribution are obtained by finite element method. It is shown that the depth increment of the contact makes the value of stress and strain in the surface layer greater and the area of action larger in the process of nanoindentation of monocrystalline germanium. In the nanoindentation experiment, load and displacement curve is different with different crystal orientations. With the increase of load, contact depth has been increased. The residual deformation depth of three crystal orientations is also different. The results of FEM is is closed to the crystal orientation of [100].