Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching

The appropriate planarization layer is the foundation for realization of ion beam deposition correction polishing technology, the significant difference between ion beam deposition correction polishing technology and ordinary ion beam polishing, is using spin or methods of ion beam sputtering deposition, forming sediments which has planarization effect on the processing surface to reduce intermediate frequency error, coupled with ion beam polishing, removing the high-frequency processing error, the typical error is cut marks by single point diamond turning left on the component surface.

Download Full-text

Improving the performance of single point diamond turning surface with ion beam figuring

Optik ◽

10.1016/j.ijleo.2018.07.039 ◽

2018 ◽

Vol 172 ◽

pp. 540-544 ◽

Cited By ~ 3

Author(s):

Yuetian Huang ◽

Bin Fan ◽

Yongjian Wan ◽

Shijie Li

Keyword(s):

Ion Beam ◽

Single Point ◽

Diamond Turning ◽

Ion Beam Figuring

Download Full-text

Evaluation of a Novel Nanodroplet Cutting Fluid for Diamond Turning of Optical Polymers

Polymers ◽

10.3390/polym12102213 ◽

2020 ◽

Vol 12 (10) ◽

pp. 2213

Author(s):

Lihua Li ◽

Hau Chung Wong ◽

Rong Bin Lee

Keyword(s):

Single Point ◽

Microlens Array ◽

Diamond Turning ◽

Cutting Fluid ◽

Surface Irregularity ◽

Optical Polymers ◽

Micro Level ◽

Emulsified Water ◽

Cutting Experiments

In this study, a novel nanodroplet cutting fluid (NDCF), consisting of emulsified water and oil nanodroplets, was developed to improve the surface quality of the single-point diamond-turned optical polymers. This developed NDCF was able to penetrate the chip–tool interface, contributing to both cooling and lubricating effects. The performance of NDCF was evaluated from perspectives of the surface irregularity, roughness, and cutting force of the machined groove in a series of taper cutting experiments. Meanwhile, a high-quality optical surface was obtained and the micro-level form error was reduced in the diamond turning of a Polymethylmethacrylate (PMMA) microlens array.

Download Full-text

Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Journal of the European Optical Society Rapid Publications ◽

10.1186/s41476-020-00143-6 ◽

2021 ◽

Vol 17 (1) ◽

Author(s):

M. Ulitschka ◽

J. Bauer ◽

F. Frost ◽

T. Arnold

Keyword(s):

Error Correction ◽

Spectral Range ◽

High Performance ◽

Sacrificial Layer ◽

Ion Beam ◽

Single Point ◽

Diamond Turning ◽

Special Focus ◽

Surface Smoothing ◽

Process Route

AbstractIon beam finishing techniques of aluminium mirrors have a high potential to meet the increasing demands on applications of high-performance mirror devices for visible and ultraviolet spectral range. Reactively driven ion beam machining using oxygen and nitrogen gases enables the direct figure error correction up to 1 μm machining depth while preserving the initial roughness. However, the periodic turning mark structures, which result from preliminary device shaping by single-point diamond turning, often limit the applicability of mirror surfaces in the short-periodic spectral range. Ion beam planarization with the aid of a sacrificial layer is a promising process route for surface smoothing, resulting in successfully reduction of the turning mark structures. A combination with direct surface smoothing to perform a subsequent improvement of the microroughness is presented with a special focus on roughness evolution, chemical composition, and optical surface properties. As a result, an ion beam based process route is suggested, which allows almost to recover the reflective properties and an increased long-term stability of smoothed aluminium surfaces.

Download Full-text

Cylindrical microlens array fabricated by argon ion-beam etching

Optical Engineering ◽

10.1117/1.1290686 ◽

2000 ◽

Vol 39 (11) ◽

pp. 3001 ◽

Cited By ~ 10

Author(s):

Qingle Tang

Keyword(s):

Ion Beam ◽

Microlens Array ◽

Ion Beam Etching ◽

Argon Ion

Download Full-text

Ultrastructural Features of Normal and Diseased Hair Revealed by Ion Beam Etching and Freeze Fracture

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100115419 ◽

1975 ◽

Vol 33 ◽

pp. 358-359

Author(s):

M. Spector ◽

A. C. Brown

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Ectodermal Dysplasia ◽

Ion Beam ◽

Freeze Fracture ◽

Ion Current ◽

Ion Beam Etching ◽

Pili Torti ◽

Argon Ion ◽

Scanning Electron

Ion beam etching and freeze fracture techniques were utilized in conjunction with scanning electron microscopy to study the ultrastructure of normal and diseased human hair. Topographical differences in the cuticular scale of normal and diseased hair were demonstrated in previous scanning electron microscope studies. In the present study, ion beam etching and freeze fracture techniques were utilized to reveal subsurface ultrastructural features of the cuticle and cortex.Samples of normal and diseased hair including monilethrix, pili torti, pili annulati, and hidrotic ectodermal dysplasia were cut from areas near the base of the hair. In preparation for ion beam etching, untreated hairs were mounted on conducting tape on a conducting silicon substrate. The hairs were ion beam etched by an 18 ky argon ion beam (5μA ion current) from an ETEC ion beam etching device. The ion beam was oriented perpendicular to the substrate. The specimen remained stationary in the beam for exposures of 6 to 8 minutes.

Download Full-text