Comprehensive study to evaluate the lifespan of flexible polishing pads by 3D surface characterization technique

Measurement ◽  
2018 ◽  
Vol 127 ◽  
pp. 29-41 ◽  
Author(s):  
Gourhari Ghosh ◽  
Ajay Sidpara ◽  
P.P. Bandyopadhyay
2008 ◽  
Vol 53-54 ◽  
pp. 265-272
Author(s):  
Dong Ming Guo ◽  
N. Qin ◽  
Ren Ke Kang ◽  
Zhu Ji Jin

Among the properties of polishing pad, the surface roughness plays a crucial role in CMP (Chemical Mechanical Planarization) process. However, there is no acknowledged standard for measuring and characterizing the roughness of pad surface in 3D measurement. In this paper Talysurf CLI 2000 working on the principle of dynamic confocal measurement was initially suggested to measure the 3D surface topography of polishing pads through theoretical and experimental analysis. In addition, based on the Nyquist folding frequency and the statistical theory, a selection technique for sampling interval and sampling area was proposed and verified through experiments. The results showed that Talysurf CLI 2000 is more suitable than NewView to measure the 3D surface topography of polishing pads. 2μm sampling interval, 0.5×0.5mm2 sampling area and 10μm interval, 1×1mm2 area are respectively recommended for IC1000/SubaIV and SubaIV polishing pad.


2012 ◽  
Vol 30 (2) ◽  
Author(s):  
Rodrigues Valdo Ferreira ◽  
Victor Rodolfo Araujo ◽  
Campos Wellington ◽  
Ana Catarina da Rocha Medeiros

Fracture surface characteristics have significant effect on fracture hydraulic conductivity. The available acid-fracture conductivity correlations do notconsider surface characteristics or make an incipient use of it. A proper description of the acid-fracture surfaces is the initial step towards the right consideration of surface roughness in hydraulic conductivity. This paper presents an areal (3D) surface evaluation of acid-etched fractures, simulated in samples taken from whole cores of an oil producer limestone. The topography of acid-fractured surfaces was assessed using a laser profilometer. The surfaces were evaluated with a set of 3D surface parameters. The results showed that the main features of acid-etched surfaces are large roughness, negative skewness, high kurtosis, and intermediate isotropy, mostly random, but with some spatial orientation. The acid-fractured surfaces can be represented by the rms height, which showed great linear correlation with most of the surface parameters. The parameters texture aspect ratio, bearing index, valley retention index, and density of summits showed low correlation with rms height. A method to calculate fracture width from surface topography was developed. An attempt to explain abnormal behavior in initial conductivity tests revealed the potential use of surface characterization for management of fine particles in oil and gas reservoirs. It is suggested to search improved fracture conductivity correlation through the relationship between lab measured conductivities and surface characterization parameters.


2012 ◽  
Vol 12 (10) ◽  
pp. 929-937 ◽  
Author(s):  
Arvind Chavan ◽  
Yogesh Gaikhe ◽  
Sandeep Huddedar ◽  
Raju Pawade

2017 ◽  
Vol 61 (4) ◽  
pp. 303 ◽  
Author(s):  
Hayder Al-Maliki ◽  
Gábor Kalácska

The frictional behavior of (PA6 E and PETP) engineering polymers commonly used in the industry were investigated implying 3D surface topography due to Dielectric Barrier Discharge (DBD) source, atmospheric cold plasma surface treatment and compared to the pristine surface results under the same test conditions. The 3D surface topography shows a decrease in the surface roughness after treatment and keeps good topographical stability with the function of time. The friction coefficient of treated samples were lower than the pristine one under “run-out” lubrication conditions in line with surface characterization results.


2018 ◽  
Vol 185 ◽  
pp. 72-80 ◽  
Author(s):  
Vahid Abbasian ◽  
Ehsan A. Akhlaghi ◽  
Mohammad A. Charsooghi ◽  
Maasoomeh Bazzar ◽  
Ali-Reza Moradi

1987 ◽  
Vol 105 ◽  
Author(s):  
Peter O. Hahn ◽  
I. Lampert ◽  
A. Schnegg

AbstractA newly developed optical surface characterization technique using the diffuse scattered light of two laser beams will be presented. The method determines root-mean-square roughness values (RMS) of surfaces down to 1 Å and corresponding correlation lengths in the submicron area.


2011 ◽  
Vol 19 ◽  
pp. 112-117
Author(s):  
S. Gröger ◽  
M. Gerlach

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