Self-sensing control of resonant MEMS scanner by comb-drive current feedback
2014 ◽
Vol 494-495
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pp. 1282-1285
Keyword(s):
2009 ◽
Vol 129
(12)
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pp. 2194-2200
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Keyword(s):
2012 ◽
Vol 132
(5)
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pp. 534-540
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2015 ◽
Vol 135
(6)
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pp. 671-678
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2012 ◽
Vol 132
(1)
◽
pp. 1-9
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2020 ◽
Vol 140
(4)
◽
pp. 92-96
2009 ◽
Vol 30
(1)
◽
pp. 85-87
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