Twinning-assisted void initiation and crack evolution in Cu thin film: An in situ TEM and molecular dynamics study

2018 ◽  
Vol 737 ◽  
pp. 336-340 ◽  
Author(s):  
Zongde Kou ◽  
Yanqing Yang ◽  
Lixia Yang ◽  
Bin Huang ◽  
Xian Luo
Keyword(s):  
Thin Film ◽  
Molecular Dynamics ◽  
In Situ Tem ◽  
Crack Evolution ◽  
Void Initiation ◽  
Cu Thin Film

Growth kinetics of Al2Cu in an Al-1.5Cu thin film by in Situ TEM

1993 ◽  
Vol 51 ◽  
pp. 1172-1173
Author(s):  
M. Park ◽  
S.J. Krause ◽  
S.R. Wilson
Keyword(s):  
Thin Film ◽  
In Situ Tem ◽  
Collector Plate ◽  
Transmission Electron ◽  
Device Processing ◽  
Corrosion Susceptibility ◽  
Precipitation Phenomena ◽  
Semiconductor Chips ◽  
Kinetics Of

Cu alloying in Al interconnection lines on semiconductor chips improves their resistance to electromigration and hillock growth. Excess Cu in Al can result in the formation of Cu-rich Al2Cu (θ) precipitates. These precipitates can significantly increase corrosion susceptibility due to the galvanic action between the θ-phase and the adjacent Cu-depleted matrix. The size and distribution of the θ-phase are also closely related to the film susceptibility to electromigration voiding. Thus, an important issue is the precipitation phenomena which occur during thermal device processing steps. In bulk alloys, it was found that the θ precipitates can grow via the grain boundary “collector plate mechanism” at rates far greater than allowed by volume diffusion. In a thin film, however, one might expect that the growth rate of a θ precipitate might be altered by interfacial diffusion. In this work, we report on the growth (lengthening) kinetics of the θ-phase in Al-Cu thin films as examined by in-situ isothermal aging in transmission electron microscopy (TEM).

Deformation twinning in response to cracking in Al: An in situ TEM and molecular dynamics study

2018 ◽  
Vol 145 ◽  
pp. 28-32 ◽  
Author(s):  
Zongde Kou ◽  
Yanqing Yang ◽  
Lixia Yang ◽  
Wei Zhang ◽  
Bin Huang ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Deformation Twinning ◽  
In Situ Tem

scholarly journals In situ TEM oxidation study of Fe thin-film transformation to single-crystal magnetite nanoparticles

2020 ◽  
Vol 55 (27) ◽  
pp. 12897-12905
Author(s):  
Leonardo Lari ◽  
Stephan Steinhauer ◽  
Vlado K. Lazarov
Keyword(s):  
Thin Film ◽  
Single Crystal ◽  
Magnetite Nanoparticles ◽  
In Situ Tem ◽  
Oxidation Study

T0302-2-6 In-situ TEM Experiment of Tensile Testing for Single-Crystal-Silicon Thin Film

2010 ◽  
Vol 2010.8 (0) ◽  
pp. 263-264
Author(s):  
Taeko ANDO ◽  
Hidekazu Ishihara ◽  
Masahiro Nakajima ◽  
Shigeo Arai ◽  
Toshio Fukuda ◽  
...  
Keyword(s):  
Thin Film ◽  
Single Crystal ◽  
Tensile Testing ◽  
Single Crystal Silicon ◽  
In Situ Tem ◽  
Silicon Thin Film ◽  
Crystal Silicon

In-Situ Tem Characterization of Whiskers on Al Electrodes for Thin-Film Transistors

1996 ◽  
Vol 441 ◽  
Author(s):  
K. Tsujimoto ◽  
S. Tsuji ◽  
H. Saka ◽  
K. Kuroda ◽  
H. Takatsuji ◽  
...  
Keyword(s):  
Thin Film ◽  
High Voltage ◽  
Focused Ion Beam ◽  
Liquid Crystal Display ◽  
Ion Beam ◽  
Thin Film Transistor ◽  
Dark Field ◽  
Growth Stages ◽  
In Situ Tem

AbstractThe recent attention paid to stress migration of aluminum (Al) electrodes in thin-film transistor liquid crystal display (TFT-LCD) applications indicates that wiring materials with low electrical resistivities are of considerable interest for their potential use in higher-resolution displays. In this paper, we firstly describe how as-grown Al whiskers on Al electrodes fabricated on a LCD-grade glass substrate can be characterized by means of a high-voltage transmission electron microscope (HV-TEM) operated at 1 MV. The whiskers ranging from 300 to 400 nm in diameter are sufficient to be transparent to high-voltage electrons. This allows detailed observation of whisker characteristics such as its morphology and crystallography. In most cases, the as-grown Al whiskers in our study had straight rod shapes, and could be regarded as single crystals. Secondly, we report on the in-situ fabrication and observation of Al whiskers at elevated temperature with the HV-TEM. Since relatively thick TEM samples (up to about 1 mm) can be set on a sample holder in the HV-TEM, various growth stages of Al whiskers can be investigated under various heating conditions. Finally, we demonstrate a TEM sample preparation method for the cross-section of an individual Al whisker, using focused ion beam (FIB) etching. This technique makes it possible to reduce the thickness of an Al whisker close to the root. Both bright- and dark-field TEM images provide nanostructural information on the whisker/Al thin-film interface.

scholarly journals Influence of Chemical Bonding on the Variability of Diamond-Like Carbon Nanoscale Adhesion: An In-Situ TEM/Nanoindentation and Molecular Dynamics Study

2018 ◽  
Vol 24 (S1) ◽  
pp. 1822-1823
Author(s):  
Robert W. Carpick ◽  
Rodrigo A. Bernal ◽  
Polun Chen ◽  
J. David Schall ◽  
Judith A. Harrison ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Chemical Bonding ◽  
Diamond Like Carbon ◽  
In Situ Tem

In situ TEM studies of NaCl-gas reactions

1978 ◽  
Vol 36 (1) ◽  
pp. 440-441
Author(s):  
T.T. Chung ◽  
J. Dash ◽  
R.J. O'Brien
Keyword(s):  
Thin Film ◽  
Electron Microscope ◽  
Water Vapor ◽  
Atmospheric Aerosols ◽  
In Situ Tem ◽  
Video Tape ◽  
Structure And Morphology ◽  
A Cell ◽  
Gas Reactions

The electron microscope is an important instrument for studying the structure and morphology of particulates collected from the atmosphere, but its potential for direct observation of the interactions between atmospheric aerosols and gases has not been explored previously. A cell with thin film windows and ports to permit the passage of gases was constructed for this purpose, Fig. 1. This cell is designed for use in the tilting stage of a Hitachi HU125 TEM. The thin film windows (manufactured by E. F. Full am, Inc. (1) ) consist of a composite film of formvar and evaporated SiO on 400 mesh Cu grids.In the first experiments with this cell, particles of NaCl were collected from a modified De Vilbiss nebulizer on the lower window of the cell and observed continuously during passage through the cell of either (1) water vapor or (2) water vapor and NO2.The image was recorded continuously on video tape and intermittently on sheet film.

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