Determination of the sputter rate variation pattern of a silicon carbide target for radio frequency magnetron sputtering using optical transmission measurements

Rate Variation ◽

Variation Pattern ◽

Transmission Measurements

An investigation on the effect of high partial pressure of hydrogen on the nanocrystalline structure of silicon carbide thin films prepared by radio-frequency magnetron sputtering

Spectrochimica Acta Part A Molecular and Biomolecular Spectroscopy ◽

10.1016/j.saa.2014.10.029 ◽

2015 ◽

Vol 136 ◽

pp. 1409-1417 ◽

Cited By ~ 8

Author(s):

Mohsen Daouahi ◽

Mourad Omri ◽

Abdul Ghani Yousseph Kerm ◽

Faisal Abdulaziz Al-Agel ◽

Najeh Rekik

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Partial Pressure ◽

Nanocrystalline Structure ◽

High Partial Pressure

Morphology and growth mechanism of amorphous silicon carbide sputtered on anodic aluminum template by radio frequency magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2020.04.166 ◽

2020 ◽

Vol 46 (11) ◽

pp. 19629-19633

Author(s):

Dayin Xu ◽

Congmian Zhen ◽

Hao Zhao

Keyword(s):

Silicon Carbide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Amorphous Silicon ◽

Growth Mechanism ◽

Amorphous Silicon Carbide ◽

Anodic Aluminum

Determination of Li-ion diffusion coefficient in amorphous Zn and ZnO thin films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.12.092 ◽

2011 ◽

Vol 519 (10) ◽

pp. 3373-3377 ◽

Cited By ~ 16

Author(s):

J. Xie ◽

N. Imanishi ◽

A. Hirano ◽

Y. Takeda ◽

O. Yamamoto ◽

...

Keyword(s):

Thin Films ◽

Diffusion Coefficient ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Zno Thin Films ◽

Ion Diffusion ◽

Li Ion

Determination of the optical bandgap and disorder energies of thin amorphous SiC and AlN films produced by radio frequency magnetron sputtering

Journal of Physics Conference Series ◽

10.1088/1742-6596/274/1/012113 ◽

2011 ◽

Vol 274 ◽

pp. 012113 ◽

Cited By ~ 4

Author(s):

J A Guerra ◽

L Montañez ◽

O Erlenbach ◽

G Galvez ◽

F De Zela ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Optical Bandgap ◽

Amorphous Sic

Effect of Plused Negative Bias on Nucleation and Morphological Evolution of ZnO Films Deposited by Reactive Radio-frequency Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2009.00602 ◽

2009 ◽

Vol 24 (3) ◽

pp. 602-606 ◽

Cited By ~ 1

Author(s):

Wei-Jia FU ◽

Zhi-Wen LIU ◽

Jian-Feng GU ◽

Ming LIU ◽

Qing-Yu ZHANG

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Morphological Evolution ◽

Radio Frequency Magnetron Sputtering

Zno Films ◽

Negative Bias ◽

Effect of sputtering power on the properties of SiO2 films grown by radio frequency magnetron sputtering at room temperature

Optical and Quantum Electronics ◽

10.1007/s11082-020-02639-4 ◽

2021 ◽

Vol 53 (1) ◽

Author(s):

Changjiang Zhao ◽

Leran Zhao ◽

Juncheng Liu ◽

Zhigang Liu ◽

Yan Chen

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Room Temperature ◽

Sio2 Films ◽

Sputtering Power

Mechanical, tribological, anti-corrosion and anti-glass sticking properties of high-entropy TaNbSiZrCr carbide coatings prepared using radio-frequency magnetron sputtering

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2021.124741 ◽

2021 ◽

pp. 124741

Author(s):

W.H. Kao ◽

Y.L. Su ◽

J.H. Horng ◽

W.C. Wu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

High Entropy ◽

Carbide Coatings

Nickel telluride vertically aligned thin film by radio-frequency magnetron sputtering for hydrogen evolution reaction

APL Materials ◽

10.1063/5.0024588 ◽

2020 ◽

Vol 8 (12) ◽

pp. 121104

Author(s):

Jeonghyeon Oh ◽

Ho Jun Park ◽

Arindam Bala ◽

Hee-Soo Kim ◽

Na Liu ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Hydrogen Evolution ◽

Hydrogen Evolution Reaction ◽

Vertically Aligned

Study of silicon quantum dots structure growth using radio frequency magnetron sputtering

2010 International Conference on Enabling Science and Nanotechnology (ESciNano) ◽

10.1109/escinano.2010.5701070 ◽

2010 ◽

Author(s):

Samsudi Sakrani ◽

Fatima Aldaw Idrees ◽

Zulkafli Othaman ◽

Abd. Khamim Ismail

Keyword(s):

Quantum Dots ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Silicon Quantum Dots

Structural and optical properties of CdSe0.2Te0.8 thin films prepared by radio frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2021.129320 ◽

2021 ◽

Vol 288 ◽

pp. 129320

Author(s):

Guangqiang He ◽

Zhihui Xiong ◽

Hui Yang ◽

Ming Yang ◽

Zhixi Li ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Structural And Optical Properties