Highly conductive nitrogen-doped hydrogenated nanocrystalline cubic silicon carbide thin films prepared with a hot-wire chemical vapor deposition from SiH4/CH4/H2/N2 gas
2010 ◽
Vol 175
(3)
◽
pp. 201-206
◽
Keyword(s):
Hot Wire
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2012 ◽
Vol 24
(4)
◽
pp. 1361-1368
◽
2007 ◽
Vol 46
(1)
◽
pp. 1-6
◽
2003 ◽
Vol 42
(Part 2, No.1A/B)
◽
pp. L10-L12
◽
Keyword(s):
2015 ◽
Vol 26
(5)
◽
pp. 2844-2850
◽