Properties of Hydrogenated Microcrystalline Cubic Silicon Carbide Films Deposited by Hot Wire Chemical Vapor Deposition at a Low Substrate Temperature
2004 ◽
Vol 43
(No. 9A/B)
◽
pp. L1190-L1192
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Keyword(s):
Hot Wire
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2007 ◽
Vol 46
(1)
◽
pp. 1-6
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2015 ◽
Vol 26
(5)
◽
pp. 2844-2850
◽
2007 ◽
Vol 46
(4A)
◽
pp. 1415-1426
◽
2012 ◽
Vol 24
(4)
◽
pp. 1361-1368
◽
2011 ◽
Vol 257
(8)
◽
pp. 3320-3324
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Keyword(s):