Local crystal structural modifications in pulsed laser deposited high-k dielectric thin films on silicon and germanium

2008 ◽  
Vol 11 (5-6) ◽  
pp. 245-249 ◽  
Author(s):  
Mehmet Alper Sahiner ◽  
Joseph C. Woicik ◽  
Timothy Kurp ◽  
Jeffrey Serfass ◽  
Marc Aranguren
Keyword(s):  
Thin Films ◽  
Pulsed Laser ◽  
Dielectric Thin Films ◽  
Structural Modifications ◽  
High K ◽  
Crystal Structural ◽  
Silicon And Germanium ◽  
High K Dielectric

Pulsed laser deposition and characterization of Hf-based high-k dielectric thin films

2007 ◽  
Vol 515 (16) ◽  
pp. 6548-6551 ◽  
Author(s):  
Mehmet Alper Sahiner ◽  
Joseph C. Woicik ◽  
Peng Gao ◽  
Patrick McKeown ◽  
Mark C. Croft ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

Nonvolatile Memory Characteristics Induced in High-k Dielectric Thin Films through Electron Irradiation

2011 ◽  
Vol 59 (2(2)) ◽  
pp. 726-729 ◽  
Author(s):  
Chan-Rock Park ◽  
Hong-Kyoung Lee ◽  
Jin-Ha Hwang ◽  
Young-Hwan Hahn ◽  
Byeong-Cheol Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Irradiation ◽  
Nonvolatile Memory ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric ◽  
Memory Characteristics

Atomic layer-by-layer MOCVD of high-k dielectric thin films with in-situ monitoring by spectroscopic ellipsometry

2002 ◽  
Author(s):  
Yoshishige Tsuchiya ◽  
Masato Endoh ◽  
Masatoshi Kurosawa ◽  
Raymond T. Tung ◽  
Takeo Hattori ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Layer By Layer ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric
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