High K Dielectric Thin Films For Affordable Wireless Mobile Communications Systems

2005 ◽  
Keyword(s):  
Thin Films ◽  
Mobile Communications ◽  
Dielectric Thin Films ◽  
Wireless Mobile Communications ◽  
Communications Systems ◽  
High K ◽  
Mobile Communications Systems ◽  
High K Dielectric ◽  
Wireless Mobile

Nonvolatile Memory Characteristics Induced in High-k Dielectric Thin Films through Electron Irradiation

2011 ◽  
Vol 59 (2(2)) ◽  
pp. 726-729 ◽  
Author(s):  
Chan-Rock Park ◽  
Hong-Kyoung Lee ◽  
Jin-Ha Hwang ◽  
Young-Hwan Hahn ◽  
Byeong-Cheol Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Irradiation ◽  
Nonvolatile Memory ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric ◽  
Memory Characteristics

Atomic layer-by-layer MOCVD of high-k dielectric thin films with in-situ monitoring by spectroscopic ellipsometry

2002 ◽  
Author(s):  
Yoshishige Tsuchiya ◽  
Masato Endoh ◽  
Masatoshi Kurosawa ◽  
Raymond T. Tung ◽  
Takeo Hattori ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Layer By Layer ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

Ta2O5-based high-K dielectric thin films from solution processed at low temperatures

2014 ◽  
Vol 50 ◽  
pp. 323-328 ◽  
Author(s):  
Raluca C. Frunză ◽  
Brigita Kmet ◽  
Marko Jankovec ◽  
Marko Topič ◽  
Barbara Malič
Keyword(s):  
Thin Films ◽  
Low Temperatures ◽  
Solution Processed ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

Silica and High-k Dielectric Thin Films in Microelectronics

2012 ◽  
pp. 101-118 ◽  
Author(s):  
Gennadi Bersuker ◽  
Keith McKenna ◽  
Alexander Shluger
Keyword(s):  
Thin Films ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric
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