Stress testing and characterization of high-k dielectric thin films

2004 ◽  
Author(s):  
W. Luo ◽  
D. Sunardi ◽  
Y. Kuo ◽  
W. Kuo
Keyword(s):  
Thin Films ◽  
Stress Testing ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

Pulsed laser deposition and characterization of Hf-based high-k dielectric thin films

2007 ◽  
Vol 515 (16) ◽  
pp. 6548-6551 ◽  
Author(s):  
Mehmet Alper Sahiner ◽  
Joseph C. Woicik ◽  
Peng Gao ◽  
Patrick McKeown ◽  
Mark C. Croft ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

Fabrication and Characterization of High-k Dielectric Nickel Titanate Thin Films Using a Modified Sol-Gel Method

2010 ◽  
Vol 94 (1) ◽  
pp. 250-254 ◽  
Author(s):  
Shiow-Huey Chuang ◽  
Min-Lung Hsieh ◽  
Shih-Chieh Wu ◽  
Hong-Cai Lin ◽  
Tien-Sheng Chao ◽  
...  
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Gel Method ◽  
Sol Gel Method ◽  
High K ◽  
Nickel Titanate ◽  
Fabrication And Characterization ◽  
High K Dielectric

Nonvolatile Memory Characteristics Induced in High-k Dielectric Thin Films through Electron Irradiation

2011 ◽  
Vol 59 (2(2)) ◽  
pp. 726-729 ◽  
Author(s):  
Chan-Rock Park ◽  
Hong-Kyoung Lee ◽  
Jin-Ha Hwang ◽  
Young-Hwan Hahn ◽  
Byeong-Cheol Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Irradiation ◽  
Nonvolatile Memory ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric ◽  
Memory Characteristics

Atomic layer-by-layer MOCVD of high-k dielectric thin films with in-situ monitoring by spectroscopic ellipsometry

2002 ◽  
Author(s):  
Yoshishige Tsuchiya ◽  
Masato Endoh ◽  
Masatoshi Kurosawa ◽  
Raymond T. Tung ◽  
Takeo Hattori ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Layer By Layer ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

Ta2O5-based high-K dielectric thin films from solution processed at low temperatures

2014 ◽  
Vol 50 ◽  
pp. 323-328 ◽  
Author(s):  
Raluca C. Frunză ◽  
Brigita Kmet ◽  
Marko Jankovec ◽  
Marko Topič ◽  
Barbara Malič
Keyword(s):  
Thin Films ◽  
Low Temperatures ◽  
Solution Processed ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric
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