High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser

2016 ◽  
Vol 79 ◽  
pp. 39-47 ◽  
Author(s):  
Evgeny Bulushev ◽  
Victor Bessmeltsev ◽  
Alexandr Dostovalov ◽  
Nikolay Goloshevsky ◽  
Alexey Wolf
2021 ◽  
Vol 61 ◽  
pp. 102427
Author(s):  
Xiaoyan Sun ◽  
Zikun Chang ◽  
Li Zeng ◽  
Xinran Dong ◽  
Youwang Hu ◽  
...  

2021 ◽  
pp. 2100178
Author(s):  
Wenguang Yang ◽  
Honghui Chu ◽  
Shuxiang Cai ◽  
Wenfeng Liang ◽  
Haibo Yu ◽  
...  

2021 ◽  
Author(s):  
Jun He ◽  
Baijie Xu ◽  
Xizhen Xu ◽  
Changrui Liao ◽  
Yiping Wang

AbstractFiber Bragg grating (FBG) is the most widely used optical fiber sensor due to its compact size, high sensitivity, and easiness for multiplexing. Conventional FBGs fabricated by using an ultraviolet (UV) laser phase-mask method require the sensitization of the optical fiber and could not be used at high temperatures. Recently, the fabrication of FBGs by using a femtosecond laser has attracted extensive interests due to its excellent flexibility in creating FBGs array or special FBGs with complex spectra. The femtosecond laser could also be used for inscribing various FBGs on almost all fiber types, even fibers without any photosensitivity. Such femtosecond-laser-induced FBGs exhibit excellent thermal stability, which is suitable for sensing in harsh environment. In this review, we present the historical developments and recent advances in the fabrication technologies and sensing applications of femtosecond-laser-inscribed FBGs. Firstly, the mechanism of femtosecond-laser-induced material modification is introduced. And then, three different fabrication technologies, i.e., femtosecond laser phase mask technology, femtosecond laser holographic interferometry, and femtosecond laser direct writing technology, are discussed. Finally, the advances in high-temperature sensing applications and vector bending sensing applications of various femtosecond-laser-inscribed FBGs are summarized. Such femtosecond-laser-inscribed FBGs are promising in many industrial areas, such as aerospace vehicles, nuclear plants, oil and gas explorations, and advanced robotics in harsh environments.


Author(s):  
Shizhou Xiao ◽  
Rui Guo ◽  
Guanghua Cheng ◽  
Yalei Wu ◽  
Wenhao Huang ◽  
...  

In this paper, a novel PZT film patterning method by femtosecond laser is proposed. The method is different from traditional dry-etching and wet-etching technology. Femtosecond laser microfabrication technology has several advantages such as high resolution, no mask direct-writing and seldom-heating, etc. A two-layer (PZT thin film and substrate) heating and ablating threshold model is built and the relationship of PZT/Si two-layer system micro ablation morphology depending on laser pulse energy is constructed. From the model and experiment data, we obtain the suitable energy region to pattern PZT film freely without damage Si substrate. A 3μm resolution of PZT pattern is achieved in our experiment. In order to verify the fabrication available of this technology, several micro functional devices are successfully patterned by optimized femtosecond pulsed laser energy and their function are detected. The results prove that the PZT patterning quality is good.


2021 ◽  
Author(s):  
Jian Zhang ◽  
Feng Geng ◽  
Zhichao Liu ◽  
Qinghua Zhang ◽  
Qiao Xu ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document