Modeling and identification of iron-less PMLSM end effects for reducing ultra-low-velocity fluctuations of ultra-precision air bearing linear motion stage

2017 ◽  
Vol 49 ◽  
pp. 92-103 ◽  
Author(s):  
Jingsi Xi ◽  
Zeguang Dong ◽  
Pinkuan Liu ◽  
Han Ding
Keyword(s):  
Air Bearing ◽  
Linear Motion ◽  
Low Velocity ◽  
End Effects ◽  
Velocity Fluctuations ◽  
Ultra Precision ◽  
Motion Stage

Finite Element and Experimental Analysis on Micro-Vibration of Ultra Precision Air Bearing Linear Motion Stage and Methods of Its Elimination

2007 ◽  
Author(s):  
Ming Zhang ◽  
Yu Zhu ◽  
Gexue Ren ◽  
Guanghong Duan ◽  
Guohua Gao
Keyword(s):  
Finite Element ◽  
Laminar Flow ◽  
Load Capacity ◽  
Air Bearing ◽  
Linear Motion ◽  
Turbulence Flow ◽  
Ultra Precision ◽  
Air Channel ◽  
Motion Stage ◽  
Micro Vibration

Air bearing linear motion stages with high speed and ultra high positioning performances are always used in steppers or scanners which are the most important equipments in microlithography process. Excellent air bearing design is one of the keys to archive those performances. Good load capacity and stiffness are always the main design objective for designers. But experiment shows that air bearing stage with high stiffness and load capacity may suffer from micro vibration. The micro vibration is not the “pneumatic hammer” which usually happens to air bearing due to poor restrictor design. Its amplitude ranges from tens to hundreds of nanometers and frequency from tens to thousands of Hz. For an ultra precision linear motion stage which positioning accuracy level is about ten nanometers, the vibration amplitude is obviously unacceptable. Further more, the micro-vibration seriously lower system’s dynamic characteristics. To find the reason of micro-vibration, finite element method is used to analyze the air flow in the air channel of air bearing. The result shows that the turbulence flow in the air channel will induce the micro-vibration. So the laminar flow in the air channel is the key way to eliminate the micro-vibration of air bearing stage. To turn the turbulence flow into laminar flow, the designer must consider the radius of the air channel, the number of air inlet and mass flow rate of air bearing comprehensively.

scholarly journals Research on Deterministic Figuring of Ultra-Precision Shaft Parts Based on Analysis and Control of Figuring Ability

Materials ◽  
2020 ◽  
Vol 13 (11) ◽  
pp. 2458
Author(s):  
Zizhou Sun ◽  
Yifan Dai ◽  
Hao Hu ◽  
Guipeng Tie ◽  
Chaoliang Guan ◽  
...  
Keyword(s):  
Machine Tools ◽  
Measured Data ◽  
Numerical Control ◽  
Cnc Machine Tools ◽  
Machining Efficiency ◽  
Air Bearing ◽  
Cnc Machine ◽  
Ultra Precision ◽  
Precision Machine Tools ◽  
And Control

The application of ultra-precision shaft parts is widely used, such as the spindle core of the air bearing spindle in ultra-precision machine tools. The precision of the spindle core is extremely high, and it is very difficult to obtain directly by traditional Computer Numerical Control (CNC) machine tools but is mostly obtained by manual grinding, whose machining efficiency is greatly limited. Based on the deterministic figuring theory, this paper focuses on the ultra-precision roundness, optimizing the filtering parameters of the measurement error data and studying the generation mechanism of the removal function morphology; the shape of the removal function is adjusted by combining the analysis of the figuring ability and positioning error. Finally, the optimized removal function is used on an experimental steel shaft, the average roundness convergence ratio is 72% higher than that of the original removal function, and the roundness reaches a 0.1 μm level. The result shows that a reasonable filtering of measured data and the removal function adjusted for the surface feature can improve the efficiency and precision of deterministic figuring on shaft parts.

Measurement of Five DOF Motion Errors in the Ultra Precision Feed Tables

2006 ◽  
Vol 505-507 ◽  
pp. 187-192 ◽  
Author(s):  
Yoon Jin Oh ◽  
Chun Hong Park ◽  
J.H. Hwang ◽  
Deug Woo Lee
Keyword(s):  
Degrees Of Freedom ◽  
Laser Interferometer ◽  
Point Method ◽  
Straight Edge ◽  
Roll Motion ◽  
Error Measurement ◽  
Linear Motion ◽  
Pitch Motion ◽  
Ultra Precision ◽  
Measuring Scheme

Five degrees-of-freedom (DOF) motion errors of an ultra precision feed table were measured in this study. The laser interferometer was used to measure the yaw and pitch errors and the reversal method was used for the roll error measurement. The linear motion errors in the vertical and horizontal directions were measured using the sequential two point method. The influence of angular motion errors on the linear motion errors while applying the sequential two point method was compensated with the data from the laser interferometer and the reversal method. Capacitive type sensors and an optical straight edge were used while applying the reversal method and the sequential two point method. To demonstrate the effectiveness of our measuring scheme for the ultra precision feed tables, five DOF motion errors of a hydrostatic table driven by a linear motor were measured and presented. From the measured repeatabilities of 5 DOF error motions, it was estimated that the measuring accuracies were ±0.02 μm for the horizontal and vertical linear motion, ±0.04 arcsec for yaw motion, ±0.05 arcsec for pitch motion and ±0.02 arcsec for roll motion.

Structural Analysis of a Grinding Machine with Linear Motion Guide Applied

2013 ◽  
Vol 336-338 ◽  
pp. 1014-1019
Author(s):  
Seon Yeol Oh ◽  
Han Seok Bang ◽  
B. Y. Choi ◽  
Woo Chun Choi ◽  
S. J. Cho
Keyword(s):  
Finite Element ◽  
Structural Analysis ◽  
Structural Design ◽  
Element Model ◽  
Linear Motion ◽  
Precision Grinding ◽  
Base Side ◽  
Ultra Precision ◽  
Linear Motion Guide ◽  
Grinding Machine

A finite element model of an ultra-precision grinding machine that can have high precision and high stiffness is constructed and structural analysis is done with equivalent stiffnesses of linear motion guides by after structural design and the deformation of the grinding machine is obtained. In order to reduce the deformation of the grinding machine that causes bad influence, structural complement is conducted by adding ribs at the lower part of the column. Also, the straightness of the grinding machine is improved by lifting that the base side of the column.

Behavior Characteristics of Nano-Stage According to Hinge Structure

2007 ◽  
Vol 7 (11) ◽  
pp. 4146-4149 ◽  
Author(s):  
Hyun-Seong Oh ◽  
Sung-Jun Lee ◽  
Yong-Woo Kim ◽  
Deug-Woo Lee
Keyword(s):  
Optical Systems ◽  
Precision Machining ◽  
System Control ◽  
Nano Scale ◽  
Composite Joint ◽  
Ultra Precision ◽  
Probe Microscope ◽  
Motion Stage ◽  
Scale Motion ◽  
Behavior Characteristics

Nano-stages are used in many ultra-precision systems, such as scanning probe microscope (SPM), optical fiber aligners, ultra-precision cutting, measuring and optical systems. Generally, ultra-precision machining and measuring are achieved using a nano-scale motion stage actuated using Piezo-electric actuators (PZT), and the importance of and demands for the motion stage increase with the need to improve system performance and accuracy. However, it is difficult to find solutions because the performance and characteristics of nano-scale motion stages are determined by various factors, such as the hinge structure, actuator, and method of system control. This paper focuses on improving of leafspring and planar joint hinges, and suggests a composite joint hinge stage.

An Integrated Micro-Gripping System for the Assembly of Miniature Mechanical Structures

2011 ◽  
Vol 317-319 ◽  
pp. 750-756 ◽  
Author(s):  
Yuan Sun ◽  
Zhi Jing Zhang ◽  
Xin Ye ◽  
Xiao Feng Zhang ◽  
Yan Feng
Keyword(s):  
Real Time ◽  
Feedback Mechanism ◽  
Linear Motion ◽  
Micro Assembly ◽  
Micro Gripper ◽  
Different Shapes ◽  
Motion Stage ◽  
Gripping Force

The current developed micro-grippers are not effectively used in micro-assembly within the scale of 0.01-10mm due to some practical problems. In this paper, we present a novel integrated micro-gripping system. In this system, the vac-sorb gripper and the micro-gripper based on a linear motion stage are employed together to stably pick up miniature mechanical structures in different shapes and dimensions. The gripping force is detected in real time and used as a feedback to control the action of the system. The design of the system and the implementation of the feedback mechanism are described in details. Experiments are taken and analyzed and the results show the designed functionality of the system.

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