Highly efficient formation process for functional silicon oxide layers at low temperatures (≤ 120 °C) using very high-frequency plasma under atmospheric pressure

2019 ◽  
Vol 60 ◽  
pp. 265-273
Author(s):  
Hiroaki Kakiuchi ◽  
Hiromasa Ohmi ◽  
Kiyoshi Yasutake
Keyword(s):  
Formation Process ◽  
Atmospheric Pressure ◽  
High Frequency ◽  
Low Temperatures ◽  
Silicon Oxide ◽  
Very High Frequency ◽  
Oxide Layers ◽  
High Frequency Plasma ◽  
Frequency Plasma ◽  
Very High

Characterization of High-Rate Deposited Microcrystalline Si Films Prepared using Atmospheric-Pressure Very High-Frequency Plasma

2019 ◽  
Vol 25 (8) ◽  
pp. 405-412
Author(s):  
Keita Tabuchi ◽  
Kentato Ouchi ◽  
Hiromasa Ohmi ◽  
Hiroaki Kakiuchi ◽  
Kiyoshi Yasutake
Keyword(s):  
Atmospheric Pressure ◽  
High Frequency ◽  
High Rate ◽  
Very High Frequency ◽  
High Frequency Plasma ◽  
Frequency Plasma ◽  
Si Films ◽  
Very High

High-Rate Deposition of Intrinsic Amorphous Silicon Layers for Solar Cells Using Very High Frequency Plasma at Atmospheric Pressure

2006 ◽  
Vol 45 (4B) ◽  
pp. 3587-3591 ◽  
Author(s):  
Hiroaki Kakiuchi ◽  
Hiromasa Ohmi ◽  
Yasuhito Kuwahara ◽  
Mitsuhiro Matsumoto ◽  
Yusuke Ebata ◽  
...  
Keyword(s):  
Solar Cells ◽  
Amorphous Silicon ◽  
Atmospheric Pressure ◽  
High Frequency ◽  
High Rate ◽  
Very High Frequency ◽  
High Frequency Plasma ◽  
Frequency Plasma ◽  
Very High

Heteroepitaxial growth of cubic SiC on Si using very-high-frequency plasma at atmospheric pressure

2008 ◽  
Vol 40 (6-7) ◽  
pp. 974-978 ◽  
Author(s):  
Hiroaki Kakiuchi ◽  
Hiromasa Ohmi ◽  
Masatoshi Aketa ◽  
Ryota Nakamura ◽  
Kiyoshi Yasutake
Keyword(s):  
Atmospheric Pressure ◽  
High Frequency ◽  
Heteroepitaxial Growth ◽  
Very High Frequency ◽  
High Frequency Plasma ◽  
Frequency Plasma ◽  
Very High

Very high frequency plasma CVD of silicon oxide

2005 ◽  
Vol 200 (1-4) ◽  
pp. 364-367 ◽  
Author(s):  
K. Schade ◽  
F. Stahr ◽  
S. Röhlecke ◽  
O. Steinke ◽  
R.H. Richter ◽  
...  
Keyword(s):  
High Frequency ◽  
Silicon Oxide ◽  
Plasma Cvd ◽  
Very High Frequency ◽  
High Frequency Plasma ◽  
Frequency Plasma ◽  
Very High
Sign in / Sign up

Export Citation Format

Share Document