High-precision and large-stroke XY micropositioning stage based on serially arranged compliant mechanisms with flexure hinges
2019 ◽
pp. 1569-1578
Keyword(s):
2019 ◽
Vol 234
(9)
◽
pp. 1859-1867
2014 ◽
Vol 38
(2)
◽
pp. 311-320
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Keyword(s):
2019 ◽
Vol 32
(1)
◽
Keyword(s):
2019 ◽
Vol 25
(11)
◽
pp. 4257-4268
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