Synthesis of n-type semiconducting diamond films in acetylene flame with nitrogen doping

2017 ◽  
Vol 36 (3) ◽  
pp. 4409-4417 ◽  
Author(s):  
Yukihiko Okumura ◽  
Kouichi Kanayama ◽  
Hiroaki Nishiguchi

Author(s):  
D.P. Malta ◽  
S.A. Willard ◽  
R.A. Rudder ◽  
G.C. Hudson ◽  
J.B. Posthill ◽  
...  

Semiconducting diamond films have the potential for use as a material in which to build active electronic devices capable of operating at high temperatures or in high radiation environments. A major goal of current device-related diamond research is to achieve a high quality epitaxial film on an inexpensive, readily available, non-native substrate. One step in the process of achieving this goal is understanding the nucleation and growth processes of diamond films on diamond substrates. Electron microscopy has already proven invaluable for assessing polycrystalline diamond films grown on nonnative surfaces.The quality of the grown diamond film depends on several factors, one of which is the quality of the diamond substrate. Substrates commercially available today have often been found to have scratched surfaces resulting from the polishing process (Fig. 1a). Electron beam-induced current (EBIC) imaging shows that electrically active sub-surface defects can be present to a large degree (Fig. 1c). Growth of homoepitaxial diamond films by rf plasma-enhanced chemical vapor deposition (PECVD) has been found to planarize the scratched substrate surface (Fig. 1b).



2007 ◽  
Vol 4 (S1) ◽  
pp. S942-S945 ◽  
Author(s):  
Akimitsu Hatta ◽  
Hiroshi Nakatsuma ◽  
Keishi Yanai ◽  
Tsuyoshi Nishikawa


2001 ◽  
Vol 72 (2) ◽  
pp. 201-203 ◽  
Author(s):  
Yoshiyuki Show ◽  
Toshikazu Matsukawa ◽  
Mitsuo Iwase ◽  
Tomio Izumi


2000 ◽  
Vol 17 (5) ◽  
pp. 370-372 ◽  
Author(s):  
Wang Wan-Lu ◽  
Liao Ke-Jun ◽  
Wang Bi-Ben


1994 ◽  
Vol 76 (5) ◽  
pp. 3020-3027 ◽  
Author(s):  
L. Bergman ◽  
M. T. McClure ◽  
J. T. Glass ◽  
R. J. Nemanich




1994 ◽  
Vol 33 (Part 2, No. 5B) ◽  
pp. L702-L704 ◽  
Author(s):  
Yoshiaki Matsumae ◽  
Yukio Akiba ◽  
Yoichi Hirose ◽  
Tateki Kurosu ◽  
Masamori Iida


1991 ◽  
Vol 58 (8) ◽  
pp. 840-841 ◽  
Author(s):  
Ken Okano ◽  
Hideo Kiyota ◽  
Tatsuya Iwasaki ◽  
Tateki Kurosu ◽  
Masamori Iida ◽  
...  


2002 ◽  
Vol 14 (8) ◽  
pp. 1765-1774 ◽  
Author(s):  
C Y Kong ◽  
W L Wang ◽  
K J Liao ◽  
S X Wang ◽  
L Fang


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