Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes

2020 ◽  
Vol 313 ◽  
pp. 112202
Author(s):  
Muhammad Zubair Aslam ◽  
Varun Jeoti ◽  
Saravanan Karuppanan ◽  
Mohanraj Soundara Pandian ◽  
Eloi Marigo Ferrer ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Multilayer Structure ◽  
Cmos Compatible ◽  
Wave Modes

ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

2008 ◽  
Vol 93 (9) ◽  
pp. 094105 ◽  
Author(s):  
X. Y. Du ◽  
Y. Q. Fu ◽  
S. C. Tan ◽  
J. K. Luo ◽  
A. J. Flewitt ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Film Thickness ◽  
Surface Acoustic Wave ◽  
Acoustic Streaming ◽  
Thickness Effect ◽  
Zno Film ◽  
Wave Modes

Properties of higher-order surface acoustic wave modes in Al1−xScxN/sapphire structures

2021 ◽  
Vol 130 (16) ◽  
pp. 164501
Author(s):  
N. M. Feil ◽  
E. Mayer ◽  
A. Nair ◽  
B. Christian ◽  
A. Ding ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Higher Order ◽  
Order Surface ◽  
Wave Modes

Comparison of Conductometric Gas Sensitivity of Surface Acoustic Wave Modes in Layered Structures

2005 ◽  
Vol 3 (1) ◽  
pp. 66-70 ◽  
Author(s):  
David A. Powell ◽  
Kourosh Kalantar-Zadeh ◽  
Samuel Ippolito ◽  
Wojtek Wlodarski
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Layered Structures ◽  
Gas Sensitivity ◽  
Wave Modes

A new type of glucose biosensor based on surface acoustic wave resonator using Mn-doped ZnO multilayer structure

2013 ◽  
Vol 49 ◽  
pp. 512-518 ◽  
Author(s):  
Jingting Luo ◽  
Pingxiang Luo ◽  
Min Xie ◽  
Ke Du ◽  
Bixia Zhao ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Multilayer Structure ◽  
Glucose Biosensor ◽  
Wave Resonator ◽  
New Type ◽  
Doped Zno ◽  
Mn Doped

The Characterization of Surface Acoustic Wave Modes on Rotated Y-Cut Quartz (ST-X Quartz) with Different AlN Film Thickness

2001 ◽  
Vol 40 (Part 1, No. 7) ◽  
pp. 4590-4592 ◽  
Author(s):  
Maw-Shung Lee ◽  
Feng-Chih Chang ◽  
Sean Wu ◽  
Long Wu
Keyword(s):  
Acoustic Wave ◽  
Film Thickness ◽  
Surface Acoustic Wave ◽  
Aln Film ◽  
Wave Modes

An aluminium nitride based multilayer structure for Love mode surface acoustic wave devices

2020 ◽  
Vol 35 (11) ◽  
pp. 115007
Author(s):  
Muhammad Zubair Aslam ◽  
Varun Jeoti ◽  
Shahid Manzoor ◽  
Mehwish Hanif ◽  
Muhammad Junaid
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Multilayer Structure ◽  
Aluminium Nitride ◽  
Acoustic Wave Devices
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