A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

2021 ◽  
Vol 332 ◽  
pp. 113129
Author(s):  
Ara Yeon ◽  
Hong Goo Yeo ◽  
Yongrae Roh ◽  
Kyungseop Kim ◽  
Hee-Seon Seo ◽  
...  
Keyword(s):  
Mechanical System ◽  
Proof Mass ◽  
Micro Electro Mechanical System ◽  
Beam Pattern ◽  
Vector Sensor

scholarly journals A bibliometric analysis of micro electro mechanical system energy harvester research

Heliyon ◽  
2021 ◽  
Vol 7 (3) ◽  
pp. e06406
Author(s):  
Ida Hamidah ◽  
Roer Eka Pawinanto ◽  
Budi Mulyanti ◽  
Jumril Yunas
Keyword(s):  
Mechanical System ◽  
Bibliometric Analysis ◽  
Energy Harvester ◽  
Micro Electro Mechanical System ◽  
System Energy

On-Chip Micro–Electro–Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing

2016 ◽  
Vol 70 (5) ◽  
pp. 897-904 ◽  
Author(s):  
Mazen Erfan ◽  
Yasser M Sabry ◽  
Mohammad Sakr ◽  
Bassem Mortada ◽  
Mostafa Medhat ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Mechanical System ◽  
Gas Sensing ◽  
Fourier Transform Infrared ◽  
Micro Electro Mechanical System ◽  
Ft Ir ◽  
On Chip

Micro-electro-mechanical system (MEMS) component research and development for army missile applications

1999 ◽  
Author(s):  
Tracy D. Hudson ◽  
Deanna K. McMillen ◽  
Paul R. Ashley ◽  
Paul B. Ruffin ◽  
Janet Baeder
Keyword(s):  
Research And Development ◽  
Mechanical System ◽  
Micro Electro Mechanical System

The Electricity Design of Pressure Sensor

2013 ◽  
Vol 438-439 ◽  
pp. 539-542
Author(s):  
Tao Li ◽  
Guo Jing Ren ◽  
Li Feng Qi ◽  
Zhi Min Liu
Keyword(s):  
Mechanical System ◽  
Pressure Sensor ◽  
Wheatstone Bridge ◽  
Micro Electro Mechanical System ◽  
Open Loop ◽  
Bridge Design ◽  
Piezoresistive Pressure Sensor ◽  
Working Principle

The relative discussion and research of Micro-Electro-Mechanical System (MEMS) and pressure sensor is carried out in this paper. The working principle of pressure sensor is analyzed, and the cantilever piezoresistive pressure sensor is studied in details. The electricity design of pressure sensor is researched. The open loop Wheatstone-bridge design is adopted in this paper, which adds the freedom of disposing circuit.

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