Investigation of Various Commonly Associated Imperfections in Radiofrequency Micro-Electro-Mechanical System Devices and its Empirical Modeling
Keyword(s):
2018 ◽
Vol 10
(5)
◽
pp. 053503
◽
2017 ◽
Vol 36
(6)
◽
pp. 666-671
◽
Keyword(s):
2013 ◽
Vol 438-439
◽
pp. 539-542