Micro-electro-mechanical system (MEMS) component research and development for army missile applications

Mapping Intimacies ◽

10.1117/12.352853 ◽

1999 ◽

Author(s):

Tracy D. Hudson ◽

Deanna K. McMillen ◽

Paul R. Ashley ◽

Paul B. Ruffin ◽

Janet Baeder

Keyword(s):

Research And Development ◽

Mechanical System ◽

Micro Electro Mechanical System

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High-aspect-ratio gas chromatography column based on micro-electro-mechanical system technology

Chinese Journal of Chromatography ◽

10.3724/sp.j.1123.2018.03037 ◽

2018 ◽

Vol 36 (9) ◽

pp. 911

Author(s):

Fan LUO ◽

Fei FENG ◽

Bin ZHAO ◽

Bowen TIAN ◽

Xuelei YANG ◽

...

Keyword(s):

Gas Chromatography ◽

Aspect Ratio ◽

Mechanical System ◽

High Aspect Ratio ◽

Micro Electro Mechanical System ◽

System Technology ◽

Chromatography Column

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Investigation of Various Commonly Associated Imperfections in Radiofrequency Micro-Electro-Mechanical System Devices and its Empirical Modeling

IETE Journal of Research ◽

10.1080/03772063.2021.1880342 ◽

2021 ◽

pp. 1-10

Author(s):

A. Karmakar ◽

B. Biswas ◽

A.K. Chauhan

Keyword(s):

Mechanical System ◽

Micro Electro Mechanical System ◽

Empirical Modeling

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A fast boundary-finite element approach for estimating anchor losses in Micro-Electro-Mechanical System resonators

Applied Mathematical Modelling ◽

10.1016/j.apm.2021.04.002 ◽

2021 ◽

Author(s):

A. Aimi ◽

L. Desiderio ◽

P. Fedeli ◽

A. Frangi

Keyword(s):

Finite Element ◽

Mechanical System ◽

Micro Electro Mechanical System ◽

Finite Element Approach ◽

Element Approach

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A bibliometric analysis of micro electro mechanical system energy harvester research

Heliyon ◽

10.1016/j.heliyon.2021.e06406 ◽

2021 ◽

Vol 7 (3) ◽

pp. e06406

Author(s):

Ida Hamidah ◽

Roer Eka Pawinanto ◽

Budi Mulyanti ◽

Jumril Yunas

Keyword(s):

Mechanical System ◽

Bibliometric Analysis ◽

Energy Harvester ◽

Micro Electro Mechanical System ◽

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On-Chip Micro–Electro–Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing

Applied Spectroscopy ◽

10.1177/0003702816638295 ◽

2016 ◽

Vol 70 (5) ◽

pp. 897-904 ◽

Author(s):

Mazen Erfan ◽

Yasser M Sabry ◽

Mohammad Sakr ◽

Bassem Mortada ◽

Mostafa Medhat ◽

...

Keyword(s):

Fourier Transform ◽

Mechanical System ◽

Gas Sensing ◽

Fourier Transform Infrared ◽

Micro Electro Mechanical System ◽

Ft Ir ◽

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A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

Sensors and Actuators A Physical ◽

10.1016/j.sna.2021.113129 ◽

2021 ◽

Vol 332 ◽

pp. 113129

Author(s):

Ara Yeon ◽

Hong Goo Yeo ◽

Yongrae Roh ◽

Kyungseop Kim ◽

Hee-Seon Seo ◽

...

Keyword(s):

Mechanical System ◽

Micro Electro Mechanical System ◽

Beam Pattern ◽

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Design optimization and simulation of micro-electro-mechanical system based solar energy harvester for low voltage applications

Journal of Renewable and Sustainable Energy ◽

10.1063/1.5034074 ◽

2018 ◽

Vol 10 (5) ◽

pp. 053503 ◽

Author(s):

S. Praveenkumar ◽

Srigitha S. Nath ◽

G. Dinesh Ram ◽

S. Ramya ◽

M. Priya

Keyword(s):

Solar Energy ◽

Design Optimization ◽

Mechanical System ◽

Energy Harvester ◽

Low Voltage ◽

Micro Electro Mechanical System ◽

Optimization And Simulation

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Continuous nanoparticles production through a combination of a micro electro mechanical system and an electromagnetic resonator cavity

Particulate Science And Technology ◽

10.1080/02726351.2017.1287796 ◽

2017 ◽

Vol 36 (6) ◽

pp. 666-671 ◽

Author(s):

Jaber Yousefi-Seyf ◽

Reza Zarghami ◽

Ismaeil Haririan

Keyword(s):

Mechanical System ◽

Micro Electro Mechanical System ◽

Resonator Cavity

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High-speed scanning fiber-optic heterodyne interferometer using a micro-electro-mechanical system mirror and an f-theta lens

Optical Review ◽

10.1007/s10043-011-0085-0 ◽

2011 ◽

Vol 18 (6) ◽

pp. 455-457 ◽

Author(s):

Long Gao ◽

Chunhui Wang ◽

Yiqin Ji ◽

Yanchao Li ◽

Yang Qu

Keyword(s):

Mechanical System ◽

Fiber Optic ◽

Micro Electro Mechanical System ◽

Heterodyne Interferometer ◽

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The Electricity Design of Pressure Sensor

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.438-439.539 ◽

2013 ◽

Vol 438-439 ◽

pp. 539-542

Author(s):

Tao Li ◽

Guo Jing Ren ◽

Li Feng Qi ◽

Zhi Min Liu

Keyword(s):

Mechanical System ◽

Pressure Sensor ◽

Wheatstone Bridge ◽

Micro Electro Mechanical System ◽

Open Loop ◽

Bridge Design ◽

Piezoresistive Pressure Sensor ◽

Working Principle

The relative discussion and research of Micro-Electro-Mechanical System (MEMS) and pressure sensor is carried out in this paper. The working principle of pressure sensor is analyzed, and the cantilever piezoresistive pressure sensor is studied in details. The electricity design of pressure sensor is researched. The open loop Wheatstone-bridge design is adopted in this paper, which adds the freedom of disposing circuit.

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