A high performance humidity sensor based on surface acoustic wave and graphene oxide on AlN/Si layered structure
2018 ◽
Vol 255
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pp. 2454-2461
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2013 ◽
Vol 60
(3)
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pp. 637-642
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1993 ◽
Vol 16
(1-3)
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pp. 288-292
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2014 ◽
Vol 28
(07)
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pp. 1450056
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2018 ◽
Vol 262
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pp. 531-541
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2019 ◽
Vol 29
(2)
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pp. 024001
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