Effective gettering of in-situ phosphorus-doped polysilicon passivating contact prepared using plasma-enhanced chemical-vapor deposition technique

2020 ◽  
Vol 206 ◽  
pp. 110256 ◽  
Author(s):  
Zhixue Wang ◽  
Zunke Liu ◽  
Mingdun Liao ◽  
Dandan Huang ◽  
Xueqi Guo ◽  
...  
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