Structural, mechanical and tribological properties of CrAlN coatings deposited by reactive unbalanced magnetron sputtering

Xing-Zhao Ding; X.T. Zeng

doi:10.1016/j.surfcoat.2005.08.072

Structural, mechanical and tribological properties of CrAlN coatings deposited by reactive unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.08.072 ◽

2005 ◽

Vol 200 (5-6) ◽

pp. 1372-1376 ◽

Cited By ~ 108

Author(s):

Xing-Zhao Ding ◽

X.T. Zeng

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Microstructure, mechanical and tribological properties of Cr–C–N coatings deposited by pulsed closed field unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2009.04.032 ◽

2009 ◽

Vol 204 (6-7) ◽

pp. 931-935 ◽

Cited By ~ 25

Author(s):

Z.L. Wu ◽

J. Lin ◽

J.J. Moore ◽

M.K. Lei

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Substrate Bias Effects on Mechanical and Tribological Properties of Nanoscale Multilayer CrTiAlN Coatings Prepared by Closed Field Unbalanced Magnetron Sputtering Ion Plating Method

Advances in Composite Materials and Structures - Key Engineering Materials ◽

10.4028/0-87849-427-8.885 ◽

2007 ◽

pp. 885-888

Author(s):

P.L. Tam ◽

P.W. Shum ◽

Z.F. Zhou ◽

K.Y. Li

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Substrate Bias ◽

Ion Plating ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Plating Method

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Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.11.019 ◽

2011 ◽

Vol 205 (8-9) ◽

pp. 3058-3065 ◽

Cited By ~ 43

Author(s):

Yongjun Wang ◽

Hongxuan Li ◽

Li Ji ◽

Fei Zhao ◽

Qinghua Kong ◽

...

Keyword(s):

Magnetron Sputtering ◽

Amorphous Carbon ◽

Tribological Properties ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Substrate Bias Effects on Mechanical and Tribological Properties of Nanoscale Multilayer CrTiAlN Coatings Prepared by Closed Field Unbalanced Magnetron Sputtering Ion Plating Method

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.334-335.885 ◽

2007 ◽

Vol 334-335 ◽

pp. 885-888 ◽

Cited By ~ 1

Author(s):

P.L. Tam ◽

P.W. Shum ◽

Zhi Feng Zhou ◽

K.Y. Li

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Substrate Bias ◽

Ion Plating ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Plating Method

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Influence of carbon content on the microstructure, mechanical and tribological properties of CrAlCN coatings deposited by DC unbalanced magnetron sputtering

Bulletin of Materials Science ◽

10.1007/s12034-018-1610-6 ◽

2018 ◽

Vol 41 (4) ◽

Cited By ~ 2

Author(s):

Elbert Contreras Romero ◽

Maryory Gómez Botero ◽

Wolfgang Tillmann ◽

Francisco Bolívar Osorio ◽

Gilberto Bejarano Gaitán

Keyword(s):

Magnetron Sputtering ◽

Carbon Content ◽

Tribological Properties ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Influence of CrB2 target current on the microstructure, mechanical and tribological properties of Cr–B–C–N coatings in water

RSC Advances ◽

10.1039/c6ra09264k ◽

2016 ◽

Vol 6 (53) ◽

pp. 47698-47711 ◽

Cited By ~ 13

Author(s):

Qiang Ma ◽

Fei Zhou ◽

Qianzhi Wang ◽

Zhiwei Wu ◽

Kangmin Chen ◽

...

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Stainless Steels ◽

Closed Field ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

Cr–B–C–N coatings with different boron contents (24.6–27.2 at%) were deposited on Si(100) wafers and 316L stainless steels by using closed-field unbalanced magnetron sputtering via adjusting the CrB2 target current.

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Influence of nitrogen variation on the microstructrual, mechanical and tribological properties of CNx coatings deposited by dc unbalanced magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2017.05.095 ◽

2017 ◽

Vol 332 ◽

pp. 414-421 ◽

Cited By ~ 1

Author(s):

E. Contreras ◽

F. Bolívar ◽

M.A. Gómez

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Mechanical and tribological properties of titanium–aluminium–nitride films deposited by reactive close-field unbalanced magnetron sputtering

Wear ◽

10.1016/j.wear.2004.07.014 ◽

2004 ◽

Vol 257 (9-10) ◽

pp. 1030-1040 ◽

Cited By ~ 39

Author(s):

P.W. Shum ◽

W.C. Tam ◽

K.Y. Li ◽

Z.F. Zhou ◽

Y.G. Shen

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Aluminium Nitride ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Titanium Aluminium

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Microstructure, mechanical and tribological properties of Cr1−xAlxN films deposited by pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS)

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.08.090 ◽

2006 ◽

Vol 201 (7) ◽

pp. 4329-4334 ◽

Cited By ~ 96

Author(s):

J. Lin ◽

B. Mishra ◽

J.J. Moore ◽

W.D. Sproul

Keyword(s):

Magnetron Sputtering ◽

Tribological Properties ◽

Closed Field ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron

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Mechanical and Tribological Properties of W(100-x)%Cx% Coatings Deposited by DC Magnetron Sputtering

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.642.184 ◽

2015 ◽

Vol 642 ◽

pp. 184-189

Author(s):

Yan Liang Su ◽

Yueh Feng Lin

Keyword(s):

Mechanical Properties ◽

Wear Resistance ◽

Magnetron Sputtering ◽

X Ray Diffraction ◽

Mechanical And Tribological Properties ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Pin On Disc ◽

Dry Conditions ◽

Coating Microstructure

W(100-x)%Cx% coatings with different tungsten and carbon contents were deposited by unbalanced magnetron sputtering. The microstructures and mechanical properties of the W(100-x)%C x% coatings was characterized by scanning electron microscope (SEM), X-ray diffraction (XRD), nanoindentation and adhesion testing techniques. The tribological performance of the coatings was investigated using a pin-on-disc trobometer under dry conditions. Experimental results indicated that coating microstructure, mechanical properties and wear resistance varied according to the tungsten and carbon contents of the coatings. The W72%C28% coating had the highest hardness/elastic modulus (H/E) ratio. In the ball-on-disc wear tests, it was found that the W72%C28% coating exhibited the best wear resistance.

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