Substrate Bias Effects on Mechanical and Tribological Properties of Nanoscale Multilayer CrTiAlN Coatings Prepared by Closed Field Unbalanced Magnetron Sputtering Ion Plating Method

2007 ◽  
pp. 885-888
Author(s):  
P.L. Tam ◽  
P.W. Shum ◽  
Z.F. Zhou ◽  
K.Y. Li
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Closed Field ◽  
Substrate Bias ◽  
Ion Plating ◽  
Mechanical And Tribological Properties ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Plating Method

Influence of CrB2 target current on the microstructure, mechanical and tribological properties of Cr–B–C–N coatings in water

RSC Advances ◽  
2016 ◽  
Vol 6 (53) ◽  
pp. 47698-47711 ◽  
Author(s):  
Qiang Ma ◽  
Fei Zhou ◽  
Qianzhi Wang ◽  
Zhiwei Wu ◽  
Kangmin Chen ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Stainless Steels ◽  
Closed Field ◽  
Mechanical And Tribological Properties ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Cr–B–C–N coatings with different boron contents (24.6–27.2 at%) were deposited on Si(100) wafers and 316L stainless steels by using closed-field unbalanced magnetron sputtering via adjusting the CrB2 target current.

Sign in / Sign up

Export Citation Format

Share Document