Structure and mechanical properties of Cr–Zr–N films synthesized by closed field unbalanced magnetron sputtering with vertical magnetron sources

2005 ◽  
Vol 200 (5-6) ◽  
pp. 1669-1675 ◽  
Author(s):  
GwangSeok Kim ◽  
BomSok Kim ◽  
SangYul Lee ◽  
JunHee Hahn
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Closed Field ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Effect of Temperature on Structure and Mechanical Properties of CrN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering

2013 ◽  
Vol 591 ◽  
pp. 190-193
Author(s):  
Hao Zhang ◽  
Shu Wang Duo ◽  
Xiang Min Xu ◽  
Ting Zhi Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Grain Shape ◽  
Effect Of Temperature ◽  
Closed Field ◽  
Columnar Crystal ◽  
Crn Coating ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Crn Coatings

CrN coatings were fabricated by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of substrate temperature (TS) on phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the phase in coatings, which has little to do with TS, was the coexistence of Cr, Cr2N and CrN. The grain shape of the columnar crystal CrN coating was the coexistence of pyramidal and plane topography. The hardness and adhension of CrN coating first increased with the rise of temperature, then decreased when the values of both them were constant ones. It has the highest hardness and bonding strength simultaneously at 300°C.

scholarly journals Effect of Boron and Oxygen on the Structure and Properties of Protective Decorative Cr–Al–Ti–N Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering (CFUBMS)

2019 ◽  
Vol 9 (22) ◽  
pp. 4977
Author(s):  
Ph. V. Kiryukhantsev-Korneev ◽  
Zh. S. Amankeldina ◽  
A. N. Sheveyko ◽  
S. Vorotilo ◽  
E. A. Levashov
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Optical Emission ◽  
Closed Field ◽  
Structural Refinement ◽  
Columnar Growth ◽  
Electrochemical Testing ◽  
Unbalanced Magnetron Sputtering ◽  
High Temperature Synthesis ◽  
Unbalanced Magnetron

Boron and oxygen-doped Cr–Al–Ti–N coatings were deposited by closed field unbalanced magnetron sputtering (CFUBMS) of TiB target manufactured by self-propagating high-temperature synthesis, and Ti, Cr, and Al targets. To evaluate the influence of doping elements, as-deposited coatings were studied by glow discharge optical emission spectroscopy (GDOES), SEM, XRD, and optical profilometry. Mechanical properties were measured by nanoindentation and tribological, abrasive and electrochemical testing. The introduction of boron suppresses columnar growth and leads to structural refinement and a decrease of coating’s surface roughness. The addition of 2.3 at.% boron results in the highest mechanical properties: hardness H = 15 GPa, stable friction coefficient f = 0.65, and specific wear Vw = 7.5 × 10−6 mm3N−1m−1. To make the coating more visually appealing, oxygen was introduced in the chamber near the end of the deposition cycle. Upper Cr–Al–Ti–B–O–N layers were studied in terms of their composition and coloration, and the developed two-layer decorative coatings were deposited on cast metallic art pieces.

Effect of N2 Flow Rate on Structure and Mechanical Properties of CrN Coatings Prepared by Closed Field Unbalanced Magnetron Sputtering

2013 ◽  
Vol 591 ◽  
pp. 95-98 ◽  
Author(s):  
Hao Zhang ◽  
Shu Wang Duo ◽  
Xiang Min Xu ◽  
Ting Zhi Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Flow Rate ◽  
Closed Field ◽  
Nitrogen Flow ◽  
Columnar Crystal ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Crystal Preferred Orientation ◽  
Crn Coatings

CrN coatings were deposited by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of N2 flow rate on composition, phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the deposition rate of CrN coatings declined with the increase of nitrogen flow percentage in a Ar/N2 mixture atmosphere. When the nitrogen flow percentage reached 50% or more, the Cr and N atomic ratio of CrN coatings is close to 1:1. The phase in coatings was the coexistence of Cr, Cr2N and CrN, but the crystal preferred orientation changed significantly with the different N2 flow rates. The columnar crystal CrN coating with low N2 flow rate was denser. The hardness and adhension of CrN coatings have no direct relationship with N2 flow rate.

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