Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating

2010 ◽  
Vol 26 (2) ◽  
pp. 119-124 ◽  
Author(s):  
Guojun Zhang ◽  
Bin Li ◽  
Bailing Jiang ◽  
Dichun Chen ◽  
Fuxue Yan
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Closed Field ◽  
Ion Plating ◽  
Unbalanced Magnetron Sputtering ◽  
Microstructure And Mechanical Properties ◽  
Unbalanced Magnetron

Effect of Temperature on Structure and Mechanical Properties of CrN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering

2013 ◽  
Vol 591 ◽  
pp. 190-193
Author(s):  
Hao Zhang ◽  
Shu Wang Duo ◽  
Xiang Min Xu ◽  
Ting Zhi Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Grain Shape ◽  
Effect Of Temperature ◽  
Closed Field ◽  
Columnar Crystal ◽  
Crn Coating ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Crn Coatings

CrN coatings were fabricated by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of substrate temperature (TS) on phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the phase in coatings, which has little to do with TS, was the coexistence of Cr, Cr2N and CrN. The grain shape of the columnar crystal CrN coating was the coexistence of pyramidal and plane topography. The hardness and adhension of CrN coating first increased with the rise of temperature, then decreased when the values of both them were constant ones. It has the highest hardness and bonding strength simultaneously at 300°C.

Sign in / Sign up

Export Citation Format

Share Document