Density improvement of silicon nanocrystals embedded in silicon carbide matrix deposited by hot-wire CVD
2013 ◽
Vol 228
◽
pp. 148-153
◽
Keyword(s):
Hot Wire
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Keyword(s):
1995 ◽
Vol 108-110
◽
pp. 45-52
◽
Keyword(s):
2011 ◽
Vol 528
(22-23)
◽
pp. 6998-7004
◽
Keyword(s):
2004 ◽
Vol 82
(6)
◽
pp. 1579-1581
◽
Keyword(s):