Nanoscale structure of submicron-thick sputter-deposited Pd films: Effect of the adatoms diffusivity by the film-substrate interaction

2017 ◽  
Vol 315 ◽  
pp. 123-129 ◽  
Author(s):  
V. Torrisi ◽  
F. Ruffino
Keyword(s):  
Substrate Interaction ◽  
Nanoscale Structure ◽  
Sputter Deposited ◽  
Film Substrate

Residual Stress, Fracture, and Adhesion in Sputter-Deposited Molybdenum Films

1988 ◽  
Vol 119 ◽  
Author(s):  
D. M. Mattox ◽  
R. E. Cuthrell
Keyword(s):  
Residual Stress ◽  
Strain Energy ◽  
Pressure Cycling ◽  
Stress Anisotropy ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Sputter Deposited ◽  
Film Substrate ◽  
Deposited Films ◽  
Deposition Conditions

AbstractAtomistically deposited films may form with high residual stresses which may be either tensile or compressive in nature. These film stresses represent stored strain energy which may affect the adhesion of the film-substrate couple and in the limit may cause spontaneous fracture at or near the film-substrate interface (loss of adhesion). In the post cathode magnetron sputter deposition of molybdenum films, we have found that the intrinsic film stresses are generally anisotropic and may easily exceed the fracture or adhesive strength of the film-substrate couple. The residual stress anisotropy in the film is dependent on the orientation with respect to the post cathode and the magnitude and nature of the stresses are very dependent on the deposition conditions, particularly gas pressure during sputtering. By using a pressure-cycling technique, we have deposited thick (5 microns) films of molybdenum which have little residual stress or stress anisotropy.

Principal Residual Strains as A function of Depth for Sputter Deposited Mo Thin Films

1994 ◽  
Vol 356 ◽  
Author(s):  
S. G. Malhotra ◽  
Z. U. Rek ◽  
L. J. Parfitt ◽  
S. M. Yalisove ◽  
J. C. Bilello
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Out Of Plane ◽  
Residual Strains ◽  
Sputter Deposited ◽  
Film Substrate ◽  
Principal Strains

AbstractTraditionally, the magnitude of the stress in a thin film is obtained by measuring the curvature of the film-substrate couple; however, these techniques all measure the average stress throughout the film thickness. On a microscopic level, the details of the strain distribution as a function of depth through the thickness of the film can have important consequences in governing film quality and ultimate morphology. A new method for determining the magnitude of principal strains (strain eigenvalues) as a function of x-ray penetration depth using grazing incidence x-ray scattering for a polycrystalline thin film will be described. Results are reported for two Mo metallizations ˜ 500 Å and ˜1000 Å thick sputtered onto Si {100} substrates. The magnitude of the principal strains at several penetration depths was accomplished by an analysis of the diffraction peak shifts of at least six independent {hkl} scattering vectors from the Mo thin films. An out-of-plane strain gradient was identified in both Mo films and the strain eigenvalues were found to be anisotropic in nature. This new methodology should work with a variety of thin films and hence would provide quantitative insight into the evolution of thin film microstructure.

scholarly journals Thermal stability of fluorinated SiO{sub 2} films: Effects of hydration and film-substrate interaction

1997 ◽  
Author(s):  
J.P. Sullivan ◽  
J.C. Barbour ◽  
P.P. Newcomer ◽  
C.A. Apblett ◽  
C.H. Seager ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Substrate Interaction ◽  
Film Substrate ◽  
Thermal Stability Of

scholarly journals Assessing the film-substrate interaction in germania films on reconstructed Au(111)

2019 ◽  
Vol 100 (24) ◽  
Author(s):  
A. L. Lewandowski ◽  
F. Stavale ◽  
S. Tosoni ◽  
W.-D. Schneider ◽  
M. Heyde ◽  
...  
Keyword(s):  
Substrate Interaction ◽  
Film Substrate

scholarly journals Interlayer Difference of Bilayer-Stacked MoS2 Structure: Probing by Photoluminescence and Raman Spectroscopy

Nanomaterials ◽  
2019 ◽  
Vol 9 (5) ◽  
pp. 796 ◽  
Author(s):  
Xiangzhe Zhang ◽  
Renyan Zhang ◽  
Xiaoming Zheng ◽  
Yi Zhang ◽  
Xueao Zhang ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Bottom Layer ◽  
Spatial Inhomogeneity ◽  
Bilayer Structure ◽  
Two Dimensional ◽  
Substrate Interaction ◽  
Structure Probing ◽  
Two Dimensional Materials ◽  
Film Substrate ◽  
Insight Into

This work reports the interlayer difference of exciton and phonon performance between the top and bottom layer of a bilayer-stacked two-dimensional materials structure (BSS). Through photoluminescence (PL) and Raman spectroscopy, we find that, compared to that of the bottom layer, the top layer of BSS demonstrates PL redshift, Raman E 2 g 1 mode redshift, and lower PL intensity. Spatial inhomogeneity of PL and Raman are also observed in the BSS. Based on theoretical analysis, these exotic effects can be attributed to substrate-coupling-induced strain and doping. Our findings provide pertinent insight into film–substrate interaction, and are of great significance to researches on bilayer-stacked structures including twisted bilayer structure, Van der Waals hetero- and homo-structure.

Extraction of Elastic Modulus and Hardness of the Soft Metallic Films on Hard Substrates by Nanoindentation

2007 ◽  
Vol 561-565 ◽  
pp. 2005-2008
Author(s):  
X.Y. Zhou ◽  
Hai Rong Wang ◽  
Zhuang De Jiang ◽  
Rui Xia Yu
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Elastic Modulus ◽  
Contact Stiffness ◽  
Cross Sectional ◽  
Simple Method ◽  
Sem Image ◽  
Sputter Deposited ◽  
Film Substrate ◽  
Hard Substrates

A simple method to extract the intrinsic mechanical properties of the soft metallic thin films on hard substrates by nanoindenation is presented. Utilizing the geometry relationship of residual impressions obtained by the SEM image and the cross-sectional profile, the pile up error in elastic modulus determination of soft thin films by the Oliver and Pharr analysis is first corrected. Knowledge of the ‘true’ elastic modulus, the ‘true’ hardness of thin film is then extracted from the measured contact stiffness data for an elastically homogeneous film-substrate system. The present method is applied for a 504 nm Au thin film sputter deposited on the glass substrate and the results show that the ‘true’ elastic modulus and hardness of Au film are 80 GPa and 1.3 GPa, which are in agreement well with the literatures.

Thermodynamics of Epitaxial Ferroelectric Films.

1995 ◽  
Vol 401 ◽  
Author(s):  
S. B. Desu ◽  
V. P. Dudkevich ◽  
P. V. Dudkevich ◽  
I. N. Zakharchenko ◽  
G. L. Kushlyan
Keyword(s):  
Thermal Expansion ◽  
Phase Transitions ◽  
Misfit Dislocations ◽  
Ferroelectric Films ◽  
Growth Stresses ◽  
Substrate Interaction ◽  
Thermal Expansion Coefficients ◽  
Expansion Coefficients ◽  
The Difference ◽  
Film Substrate

AbstractThe problem of phase transitions and physical properties of the BaTiO3-type films on the (001) single-crystal substrates of the cubic syngony was solved in the limits of the Landau- Devonshire thermodynamics. The thermoelastic film-substrate interaction caused by the difference between thermal expansion coefficients was strictly taken into consideration. The model was based on the following assumptions: 1) the film is closely conjugated with the substrate; 2) the film is sufficiently “thick”to find itself unstrained at the growth temperature Ts, ( growth stresses were compensated by misfit dislocations ), and 3) the film is sufficiently “thin, and the stresses arising at the temperatures T>Ts may be considered to be uniform.

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