Internal stress and surface morphology of zinc oxide thin films deposited by filtered cathodic vacuum arc technique

2004 ◽  
Vol 458 (1-2) ◽  
pp. 15-19 ◽  
Author(s):  
H.W. Lee ◽  
S.P. Lau ◽  
Y.G. Wang ◽  
B.K. Tay ◽  
H.H. Hng
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Surface Morphology ◽  
Internal Stress ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Filtered Cathodic Vacuum Arc

Substrate dependent internal stress in sputtered zinc oxide thin films

1992 ◽  
Vol 71 (9) ◽  
pp. 4333-4336 ◽  
Author(s):  
Jwo‐Huei Jou ◽  
Min‐Yung Han ◽  
Duen‐Jen Cheng
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Internal Stress ◽  
Oxide Thin Films

Optical properties of aluminium oxide thin films prepared at room temperature by off-plane filtered cathodic vacuum arc system

2004 ◽  
Vol 447-448 ◽  
pp. 14-19 ◽  
Author(s):  
Z.W. Zhao ◽  
B.K. Tay ◽  
G.Q. Yu ◽  
D.H.C. Chua ◽  
S.P. Lau ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Room Temperature ◽  
Aluminium Oxide ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Filtered Cathodic Vacuum Arc

Surface Morphology Study and Electrical Properties of Zinc Oxide Thin Films Deposited at Various Deposition Temperatures Using TCVD

2009 ◽  
Author(s):  
H. A. Rafaie ◽  
S. Amizam ◽  
M. H. Mamat ◽  
Z. Khusaimi ◽  
M. Z. Sahdan ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Surface Morphology ◽  
Oxide Thin Films ◽  
Morphology Study

Preparation and characterization of copper oxide thin films deposited by filtered cathodic vacuum arc

2003 ◽  
Vol 37 (1) ◽  
pp. 81-85 ◽  
Author(s):  
Z H Gan ◽  
G Q Yu ◽  
B K Tay ◽  
C M Tan ◽  
Z W Zhao ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Filtered Cathodic Vacuum Arc

Optical characterization of filtered vacuum arc deposited zinc oxide thin films

2006 ◽  
Vol 21 (9) ◽  
pp. 1303-1310 ◽  
Author(s):  
E Çetinörgü ◽  
S Goldsmith ◽  
V N Zhitomirsky ◽  
R L Boxman ◽  
C L Bungay
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Characterization ◽  
Vacuum Arc ◽  
Oxide Thin Films
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