Optical properties of aluminium oxide thin films prepared at room temperature by off-plane filtered cathodic vacuum arc system

2004 ◽  
Vol 447-448 ◽  
pp. 14-19 ◽  
Author(s):  
Z.W. Zhao ◽  
B.K. Tay ◽  
G.Q. Yu ◽  
D.H.C. Chua ◽  
S.P. Lau ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Room Temperature ◽  
Aluminium Oxide ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Filtered Cathodic Vacuum Arc

Internal stress and surface morphology of zinc oxide thin films deposited by filtered cathodic vacuum arc technique

2004 ◽  
Vol 458 (1-2) ◽  
pp. 15-19 ◽  
Author(s):  
H.W. Lee ◽  
S.P. Lau ◽  
Y.G. Wang ◽  
B.K. Tay ◽  
H.H. Hng
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Surface Morphology ◽  
Internal Stress ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Filtered Cathodic Vacuum Arc

Preparation and characterization of copper oxide thin films deposited by filtered cathodic vacuum arc

2003 ◽  
Vol 37 (1) ◽  
pp. 81-85 ◽  
Author(s):  
Z H Gan ◽  
G Q Yu ◽  
B K Tay ◽  
C M Tan ◽  
Z W Zhao ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Vacuum Arc ◽  
Oxide Thin Films ◽  
Filtered Cathodic Vacuum Arc

Electrical and optical properties of Ga doped zinc oxide thin films deposited at room temperature by continuous composition spread

2010 ◽  
Vol 256 (21) ◽  
pp. 6219-6223 ◽  
Author(s):  
Keun Jung ◽  
Won-Kook Choi ◽  
Seok-Jin Yoon ◽  
Hyun Jae Kim ◽  
Ji-Won Choi
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Room Temperature ◽  
Oxide Thin Films ◽  
Electrical And Optical Properties
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