Mechanical properties of carbon-modified silicon oxide barrier films deposited by plasma enhanced chemical vapor deposition on polymer substrates

2007 ◽  
Vol 515 (13) ◽  
pp. 5430-5438 ◽  
Author(s):  
A. Bieder ◽  
V. Gondoin ◽  
Y. Leterrier ◽  
G. Tornare ◽  
Ph. Rudolf von Rohr ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Silicon Oxide ◽  
Chemical Vapor ◽  
Polymer Substrates ◽  
Barrier Films ◽  
Oxide Barrier

scholarly journals A reactive molecular dynamics study on the mechanical properties of a recently synthesized amorphous carbon monolayer converted into a nanotube/nanoscroll

2021 ◽  
Author(s):  
Marcelo Lopes Pereira Junior ◽  
Wiliam Ferreira da Cunha ◽  
Douglas Soares Galvão ◽  
Luiz Antonio Ribeiro Junior
Keyword(s):  
Mechanical Properties ◽  
Molecular Dynamics ◽  
Chemical Vapor Deposition ◽  
Amorphous Carbon ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Free Standing ◽  
Reactive Molecular Dynamics

Recently, laser-assisted chemical vapor deposition has been used to synthesize a free-standing, continuous, and stable monolayer amorphous carbon (MAC).

scholarly journals Low Temperature Physical-Chemical Vapor Deposition of Ti-Si-N-O Barrier Films

2006 ◽  
Vol 9 (3) ◽  
pp. G100 ◽  
Author(s):  
Y. C. Ee ◽  
Z. Chen ◽  
T.-M. Lu ◽  
Z. L. Dong ◽  
S. B. Law
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Barrier Films ◽  
Physical Chemical
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