Structural, electrical, and optical properties of antimony-doped tin oxide films prepared at room temperature by radio frequency magnetron sputtering for transparent electrodes

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3139891 ◽

2009 ◽

Vol 27 (4) ◽

pp. 996-1000 ◽

Author(s):

Sung Uk Lee ◽

Byungyou Hong ◽

Won Seok Choi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Room Temperature ◽

Oxide Films ◽

Transparent Electrodes ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.05.093 ◽

2008 ◽

Vol 516 (8) ◽

pp. 1984-1991 ◽

Author(s):

Chih-hao Yang ◽

Shih-chin Lee ◽

Tien-chai Lin ◽

Suz-cheng Chen

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Plastic Substrates ◽

Tin Oxide Films

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Effect of oxygen concentration in the sputtering ambient on the microstructure, electrical and optical properties of radio-frequency magnetron-sputtered indium tin oxide films

Semiconductor Science and Technology ◽

10.1088/0268-1242/11/2/009 ◽

1996 ◽

Vol 11 (2) ◽

pp. 196-202 ◽

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Optical Properties ◽

Radio Frequency ◽

Oxygen Concentration ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Electrical And Optical Properties ◽

Effect Of Oxygen ◽

Tin Oxide Films

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Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by RPD at room temperature

Materials Letters ◽

10.1016/j.matlet.2016.06.084 ◽

2016 ◽

Vol 182 ◽

pp. 32-35 ◽

Author(s):

Jianhua Shi ◽

Leilei Shen ◽

Fanying Meng ◽

Zhengxin Liu

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Room Temperature ◽

Oxide Films ◽

Electrical And Optical Properties ◽

Tin Oxide Films

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Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.365556 ◽

1997 ◽

Vol 81 (12) ◽

pp. 7764-7772 ◽

Author(s):

Kun Ho Kim ◽

Ki Cheol Park ◽

Dae Young Ma

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

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A study for the bias control of indium–tin–oxide films synthesized by cesium assisted radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1584038 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1069-1072 ◽

Author(s):

Deuk Yeon Lee ◽

Se-Jong Lee ◽

Kie Moon Song ◽

Hong Koo Baik

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Thickness Dependence of Electrical and Optical Properties of Indium Tin Oxide Film Deposited by Radio Frequency Magnetron Sputtering

International Photonics and Optoelectronics Meetings (POEM) ◽

10.1364/aoee.2013.asa3a.24 ◽

2013 ◽

Author(s):

Ge Wang ◽

Lei Zhao ◽

Hongwei Diao ◽

Jingwei Chen ◽

Baojun Yan ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Thickness Dependence ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties

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Deposition of indium tin oxide films on polycarbonate substrates by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(96)09311-x ◽

1997 ◽

Vol 298 (1-2) ◽

pp. 221-227 ◽

Author(s):

Wen-Fa Wu ◽

Bi-Shiou Chiou

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tin Oxide Films

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Structures, electrical and optical properties of nickel oxide films by radio frequency magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2013.11.009 ◽

2014 ◽

Vol 103 ◽

pp. 14-16 ◽

Author(s):

Y. Zhao ◽

H. Wang ◽

C. Wu ◽

Z.F. Shi ◽

F.B. Gao ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Nickel Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Nickel Oxide Films

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Indium tin oxide films deposited on polyethylene naphthalate substrates by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.10.016 ◽

2009 ◽

Vol 517 (8) ◽

pp. 2596-2601 ◽

Author(s):

M.G. Sandoval-Paz ◽

R. Ramírez-Bon

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Polyethylene Naphthalate ◽

Tin Oxide Films

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Optical and electrical properties of Mg-doped zinc tin oxide films prepared by radio frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2013.09.035 ◽

2013 ◽

Vol 286 ◽

pp. 131-136 ◽

Author(s):

Tae Young Ma ◽

Mu Hee Choi

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Tin Oxide ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Tin Oxide ◽

Tin Oxide Films ◽

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