Thickness Dependence of Electrical and Optical Properties of Indium Tin Oxide Film Deposited by Radio Frequency Magnetron Sputtering

2013 ◽  
Author(s):  
Ge Wang ◽  
Lei Zhao ◽  
Hongwei Diao ◽  
Jingwei Chen ◽  
Baojun Yan ◽  
...  
Keyword(s):  
Optical Properties ◽  
Oxide Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Radio Frequency Magnetron ◽  
Thickness Dependence ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical And Optical Properties

Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by Radio Frequency Magnetron Sputtering

2020 ◽  
Vol 217 (14) ◽  
pp. 1900955
Author(s):  
Maki Kushimoto ◽  
Tadayoshi Sakai ◽  
Yoshihiro Ueoka ◽  
Shigekazu Tomai ◽  
Satoshi Katsumata ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical And Optical Properties
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