Structural and mechanical characterization of BCxNy thin films deposited by pulsed reactive magnetron sputtering

Growth and Characterization of Tungsten Oxide Thin Films using the Reactive Magnetron Sputtering System

Journal of Inorganic and Organometallic Polymers and Materials ◽

10.1007/s10904-016-0380-0 ◽

2016 ◽

Vol 26 (4) ◽

pp. 889-894 ◽

Cited By ~ 8

Author(s):

S. Firoozbakht ◽

E. Akbarnejad ◽

A. Salar Elahi ◽

M. Ghoranneviss

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Tungsten Oxide ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Tungsten Oxide Thin Films ◽

Sputtering System

Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering

Solid State Sciences ◽

10.1016/j.solidstatesciences.2010.11.019 ◽

2011 ◽

Vol 13 (2) ◽

pp. 314-320 ◽

Cited By ~ 21

Author(s):

A. Mallikarjuna Reddy ◽

A. Sivasankar Reddy ◽

Kee-Sun Lee ◽

P. Sreedhara Reddy

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

Synthesis and characterization of single-phase epitaxial Cr2N thin films by reactive magnetron sputtering

Journal of Materials Science ◽

10.1007/s10853-018-2914-z ◽

2018 ◽

Vol 54 (2) ◽

pp. 1434-1442 ◽

Cited By ~ 2

Author(s):

M. A. Gharavi ◽

G. Greczynski ◽

F. Eriksson ◽

J. Lu ◽

B. Balke ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Single Phase ◽

Synthesis And Characterization ◽

Optical and structural characterization of Tm2O3, TmN, and TmOxNy thin films grown by direct-current reactive magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2020.138450 ◽

2021 ◽

Vol 717 ◽

pp. 138450

Author(s):

Axel Meeuwissen ◽

Giacomo B.F. Bosco ◽

Erik van der Kolk

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Direct Current ◽

Structural Characterization ◽

Surface characterization of TiO2 thin films obtained by high-energy reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2008.01.017 ◽

2008 ◽

Vol 254 (14) ◽

pp. 4396-4400 ◽

Cited By ~ 38

Author(s):

R. Wasielewski ◽

J. Domaradzki ◽

D. Wojcieszak ◽

D. Kaczmarek ◽

A. Borkowska ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Surface Characterization ◽

High Energy ◽

Reactive Magnetron ◽

Tio2 Thin Films

Characterization of inhomogeneity in TiO2 thin films prepared by pulsed dc reactive magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.07.064 ◽

2011 ◽

Vol 520 (1) ◽

pp. 272-279 ◽

Cited By ~ 17

Author(s):

M. Horprathum ◽

P. Eiamchai ◽

P. Chindaudom ◽

N. Nuntawong ◽

V. Patthanasettakul ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Reactive Magnetron ◽

Tio2 Thin Films ◽

Pulsed Dc ◽

Dc Reactive Magnetron Sputtering

The characterization of Cu-doped ZnO thin films prepared by using radio-frequency reactive magnetron sputtering

Journal of the Korean Physical Society ◽

10.3938/jkps.70.856 ◽

2017 ◽

Vol 70 (9) ◽

pp. 856-860 ◽

Cited By ~ 1

Author(s):

Chaoqun Cai ◽

Hongqiang Zhang ◽

Jun Xie ◽

Ligang Ma

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Zno Thin Films ◽

Reactive Magnetron ◽

Doped Zno

Characterization of piezoelectric AlN thin films deposited on Si by RF reactive magnetron sputtering at low temperature for acoustic wave devices

10.22215/etd/2004-05798 ◽

2004 ◽

Author(s):

Akhtar Mirfazli

Keyword(s):

Thin Films ◽

Low Temperature ◽

Acoustic Wave ◽

Magnetron Sputtering ◽

Reactive Magnetron ◽

Acoustic Wave Devices

Structural and mechanical characterization of Cr-Ta-N hard coatings prepared by reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/0257-8972(95)02624-x ◽

1996 ◽

Vol 82 (1-2) ◽

pp. 42-47 ◽

Cited By ~ 37

Author(s):

Ranjana Saha ◽

Rama B. Inturi ◽

John A. Barnard

Keyword(s):

Magnetron Sputtering ◽

Mechanical Characterization ◽

Hard Coatings ◽

Preparation and characterization of Nickel Oxide thin films by direct current reactive magnetron sputtering at different substrate temperatures

Electronic Materials Letters ◽

10.1007/s13391-014-2181-3 ◽

2014 ◽

Vol 10 (5) ◽

pp. 887-892 ◽

Cited By ~ 7

Author(s):

A. Mallikarjuna Reddy ◽

Chang Woo Byun ◽

Seung Ki Joo ◽

A. Sivasankar Reddy ◽

P. Sreedhara Reddy

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Nickel Oxide ◽

Direct Current ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Substrate Temperatures ◽

Nickel Oxide Thin Films