Study on the mechanism of rapid solid-phase recrystallization of hydrogenated amorphous silicon film by rapid thermal processing

2010 ◽  
Vol 518 (15) ◽  
pp. 4473-4476 ◽  
Author(s):  
Xiaoyong Gao ◽  
Hongliang Feng ◽  
Qinggeng Lin ◽  
Liwei Zhang ◽  
Xuwei Liu ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Thermal Processing ◽  
Solid Phase ◽  
Silicon Film ◽  
Rapid Thermal Processing ◽  
Hydrogenated Amorphous Silicon ◽  
Phase Recrystallization ◽  
Amorphous Silicon Film ◽  
Hydrogenated Amorphous

Pyrolytic transformation from polydihydrosilane to hydrogenated amorphous silicon film

2012 ◽  
Vol 520 (21) ◽  
pp. 6603-6607 ◽  
Author(s):  
Takashi Masuda ◽  
Yasuo Matsuki ◽  
Tatsuya Shimoda
Keyword(s):  
Amorphous Silicon ◽  
Silicon Film ◽  
Hydrogenated Amorphous Silicon ◽  
Amorphous Silicon Film ◽  
Hydrogenated Amorphous

scholarly journals 3P227 Biosensor using electrochemical laminated gels photocontrolled on hydrogenated amorphous silicon film(14. Chemoreception,Poster)

2013 ◽  
Vol 53 (supplement1-2) ◽  
pp. S249
Author(s):  
Hiroki Suzuki ◽  
Ryohei Matsueda ◽  
Teruo Matsuno ◽  
Takahiko Sano ◽  
Yuta Ando ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Silicon Film ◽  
Hydrogenated Amorphous Silicon ◽  
Amorphous Silicon Film ◽  
Hydrogenated Amorphous
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