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Atomic Vapor Depositions of Ti–Ta–O thin films for Metal–Insulator–Metal applications
Thin Solid Films
◽
10.1016/j.tsf.2011.01.239
◽
2011
◽
Vol 519
(11)
◽
pp. 3831-3834
◽
Cited By ~ 6
Author(s):
M. Lukosius
◽
C. Baristiran Kaynak
◽
Ch. Wenger
◽
G. Ruhl
◽
S. Rushworth
◽
...
Keyword(s):
Thin Films
◽
Atomic Vapor
◽
Metal Insulator
◽
Metal Insulator Metal
Download Full-text
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References
NiCr Bottom Electrodes for Ta 2 O 5 High Dielectric Thin Films in Metal-Insulator-Metal Capacitors
Integrated Ferroelectrics
◽
10.1080/713718288
◽
2002
◽
Vol 47
(1)
◽
pp. 41-48
◽
Cited By ~ 5
Author(s):
Eung-Min Lee
◽
Soon-Gil Yoon
Keyword(s):
Thin Films
◽
Metal Insulator
◽
Dielectric Thin Films
◽
Metal Insulator Metal
◽
High Dielectric
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Enhancement on crystallinity property of low annealed PbTiO3 thin films for metal-insulator-metal capacitor
10.1063/1.5036872
◽
2018
◽
Author(s):
Z. Nurbaya
◽
M. H. Wahid
◽
M. D. Rozana
◽
S. A. H. Alrokayan
◽
H. A. Khan
◽
...
Keyword(s):
Thin Films
◽
Metal Insulator
◽
Metal Insulator Metal
Download Full-text
High performance metal–insulator–metal capacitors with atomic vapor deposited HfO2 dielectrics
Thin Solid Films
◽
10.1016/j.tsf.2010.01.060
◽
2010
◽
Vol 518
(15)
◽
pp. 4380-4384
◽
Cited By ~ 23
Author(s):
M. Lukosius
◽
Ch. Walczyk
◽
M. Fraschke
◽
D. Wolansky
◽
H. Richter
◽
...
Keyword(s):
High Performance
◽
Atomic Vapor
◽
Metal Insulator
◽
Metal Insulator Metal
Download Full-text
Properties of atomic-vapor and atomic-layer deposited Sr, Ti, and Nb doped Ta2O5 Metal–Insulator–Metal capacitors
Thin Solid Films
◽
10.1016/j.tsf.2011.10.199
◽
2012
◽
Vol 520
(14)
◽
pp. 4576-4579
◽
Cited By ~ 3
Author(s):
M. Lukosius
◽
C. Baristiran Kaynak
◽
S. Kubotsch
◽
T. Blomberg
◽
G. Ruhl
◽
...
Keyword(s):
Atomic Layer
◽
Atomic Vapor
◽
Metal Insulator
◽
Metal Insulator Metal
Download Full-text
Study of leakage current in metal–insulator–metal Mg–Al co-doped barium strontium titanate thin films as a function of temperature and applied field
Thin Solid Films
◽
10.1016/j.tsf.2008.04.059
◽
2008
◽
Vol 516
(23)
◽
pp. 8441-8446
◽
Cited By ~ 5
Author(s):
M.C. Kao
◽
S.Y. Lee
◽
H.Z. Chen
◽
S.L. Young
Keyword(s):
Thin Films
◽
Leakage Current
◽
Strontium Titanate
◽
Barium Strontium Titanate
◽
Applied Field
◽
Metal Insulator
◽
Barium Strontium
◽
Metal Insulator Metal
◽
Co Doped
Download Full-text
Comparison of Multilayer Dielectric Thin Films for Future Metal–Insulator–Metal Capacitors: Al2O3/HfO2/Al2O3versus SiO2/HfO2/SiO2
Japanese Journal of Applied Physics
◽
10.7567/jjap.50.10pb06
◽
2011
◽
Vol 50
(10S)
◽
pp. 10PB06
◽
Cited By ~ 1
Author(s):
Sang-Uk Park
◽
Hyuk-Min Kwon
◽
In-Shik Han
◽
Yi-Jung Jung
◽
Ho-Young Kwak
◽
...
Keyword(s):
Thin Films
◽
Metal Insulator
◽
Dielectric Thin Films
◽
Metal Insulator Metal
◽
Multilayer Dielectric
Download Full-text
Erratum: “Comparison of Multilayer Dielectric Thin Films for Future Metal–Insulator–Metal Capacitors: Al2O3/HfO2/Al2O3versus SiO2/HfO2/SiO2”
Japanese Journal of Applied Physics
◽
10.7567/jjap.50.129202
◽
2011
◽
Vol 50
(12R)
◽
pp. 129202
Author(s):
Sang-Uk Park
◽
Hyuk-Min Kwon
◽
In-Shik Han
◽
Yi-Jung Jung
◽
Ho-Young Kwak
◽
...
Keyword(s):
Thin Films
◽
Metal Insulator
◽
Dielectric Thin Films
◽
Metal Insulator Metal
◽
Multilayer Dielectric
Download Full-text
WITHDRAWN: Tailored cerium-aluminate high-k dielectric thin films for metal–insulator–metal device applications
Thin Solid Films
◽
10.1016/j.tsf.2009.12.008
◽
2009
◽
Author(s):
Rakesh Sohal
◽
Grzegorz Lupina
◽
Peter Zaumseil
◽
Thomas Schroeder
Keyword(s):
Thin Films
◽
Metal Insulator
◽
Dielectric Thin Films
◽
High K
◽
Metal Insulator Metal
◽
Device Applications
◽
High K Dielectric
Download Full-text
Electrical Characteristics of HfO2-Al2O3 Dielectric Thin Films Grown by Atomic-Layer-Deposition in Metal-Insulator-Metal Capacitor Configuration
ECS Meeting Abstracts
◽
10.1149/ma2007-01/17/816
◽
2007
◽
Keyword(s):
Thin Films
◽
Atomic Layer Deposition
◽
Atomic Layer
◽
Electrical Characteristics
◽
Metal Insulator
◽
Dielectric Thin Films
◽
Layer Deposition
◽
Metal Insulator Metal
Download Full-text
Investigation of TiO2 Thin Films Etching by Using the Metal-Insulator-Metal Capacitor in a Adaptive Coupled Plasma
ECS Meeting Abstracts
◽
10.1149/ma2011-01/25/1498
◽
2011
◽
Keyword(s):
Thin Films
◽
Tio2 Thin Films
◽
Metal Insulator
◽
Metal Insulator Metal
Download Full-text
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