NiCr Bottom Electrodes for Ta 2 O 5 High Dielectric Thin Films in Metal-Insulator-Metal Capacitors
Keyword(s):
2011 ◽
Vol 50
(10S)
◽
pp. 10PB06
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Keyword(s):
Keyword(s):
2011 ◽
Vol 50
(10)
◽
pp. 10PB06
◽
Keyword(s):
Keyword(s):
2011 ◽
Vol 158
(1)
◽
pp. G1
◽
Keyword(s):
2007 ◽
Vol 46
(10B)
◽
pp. 6984-6986
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