Impact of microcrystalline silicon carbide growth using hot-wire chemical vapor deposition on crystalline silicon surface passivation

Vapor Deposition ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Hot Wire ◽

Microcrystalline Silicon ◽

Excellent crystalline silicon surface passivation by amorphous silicon irrespective of the technique used for chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3579540 ◽

2011 ◽

Vol 98 (15) ◽

pp. 153514 ◽

Cited By ~ 48

Author(s):

Jan-Willem A. Schüttauf ◽

Karine H. M. van der Werf ◽

Inge M. Kielen ◽

Wilfried G. J. H. M. van Sark ◽

Jatindra K. Rath ◽

...

Keyword(s):

Amorphous Silicon ◽

Vapor Deposition ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Crystalline silicon surface passivation with amorphous SiCx:H films deposited by plasma-enhanced chemical-vapor deposition

Journal of Applied Physics ◽

10.1063/1.2140867 ◽

2005 ◽

Vol 98 (11) ◽

pp. 114912 ◽

Cited By ~ 20

Author(s):

I. Martín ◽

M. Vetter ◽

M. Garín ◽

A. Orpella ◽

C. Voz ◽

...

Keyword(s):

Vapor Deposition ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Fabrication of Microcrystalline Cubic Silicon Carbide/Crystalline Silicon Heterojunction Solar Cell by Hot Wire Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.1 ◽

2007 ◽

Vol 46 (1) ◽

pp. 1-6 ◽

Cited By ~ 36

Author(s):

Chandan Banerjee ◽

Kannan Lakshmi Narayanan ◽

Keisuke Haga ◽

Jaran Sritharathikhun ◽

Shinsuke Miyajima ◽

...

Keyword(s):

Silicon Carbide ◽

Solar Cell ◽

Vapor Deposition ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Heterojunction Solar Cell ◽

Hot Wire ◽

Silicon Heterojunction Solar Cell ◽

Cubic Silicon Carbide

Highly transparent microcrystalline silicon carbide grown with hot wire chemical vapor deposition as window layers in n-i-p microcrystalline silicon solar cells

Applied Physics Letters ◽

10.1063/1.2739335 ◽

2007 ◽

Vol 90 (20) ◽

pp. 203502 ◽

Cited By ~ 34

Author(s):

Y. Huang ◽

A. Dasgupta ◽

A. Gordijn ◽

F. Finger ◽

R. Carius

Keyword(s):

Silicon Carbide ◽

Solar Cells ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

Microcrystalline Silicon

Study of surface passivation of crystalline silicon with amorphous silicon carbide deposited by plasma enhanced chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3665617 ◽

2011 ◽

Vol 99 (23) ◽

pp. 232106 ◽

Cited By ~ 4

Author(s):

D. Klein ◽

M. Kunst

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Surface Passivation ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Amorphous Silicon Carbide

Hot-wire chemical vapor deposition prepared aluminum doped p-type microcrystalline silicon carbide window layers for thin film silicon solar cells

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.05fm04 ◽

2014 ◽

Vol 53 (5S1) ◽

pp. 05FM04 ◽

Cited By ~ 7

Author(s):

Tao Chen ◽

Florian Köhler ◽

Anna Heidt ◽

Reinhard Carius ◽

Friedhelm Finger

Keyword(s):

Thin Film ◽

Silicon Carbide ◽

Solar Cells ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

Microcrystalline Silicon ◽

P Type

Comparison of surface passivation of crystalline silicon by a-Si:H with and without atomic hydrogen treatment using hot-wire chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2011.01.319 ◽

2011 ◽

Vol 519 (14) ◽

pp. 4476-4478 ◽

Cited By ~ 22

Author(s):

J.W.A. Schüttauf ◽

C.H.M. van der Werf ◽

W.G.J.H.M. van Sark ◽

J.K. Rath ◽

R.E.I. Schropp

Keyword(s):

Vapor Deposition ◽

Atomic Hydrogen ◽

Surface Passivation ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Hydrogen Treatment ◽

Hot Wire

Atmospheric pressure chemical vapor deposition of aluminum oxide for silicon surface passivation—background and materials science

Surface Passivation of Industrial Crystalline Silicon Solar Cells ◽

10.1049/pbpo106e_ch6 ◽

2018 ◽

pp. 73-80

Author(s):

Kristopher O. Davis

Keyword(s):

Aluminum Oxide ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Silicon Surface ◽

Surface Passivation ◽

Materials Science ◽

Chemical Vapor ◽

Pressure Chemical ◽

Role of oxygen and nitrogen in n-type microcrystalline silicon carbide grown by hot wire chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.4971402 ◽

2016 ◽

Vol 120 (22) ◽

pp. 225105 ◽

Cited By ~ 4

Author(s):

Manuel Pomaska ◽

Jan Mock ◽

Florian Köhler ◽

Uwe Zastrow ◽

Martina Perani ◽

...

Keyword(s):

Silicon Carbide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Microcrystalline Silicon

Characterization of Undoped, N- and P-Type Hydrogenated Nanocrystalline Silicon Carbide Films Deposited by Hot-Wire Chemical Vapor Deposition at Low Temperatures

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.1415 ◽

2007 ◽

Vol 46 (4A) ◽

pp. 1415-1426 ◽

Cited By ~ 46

Author(s):

Shinsuke Miyajima ◽

Akira Yamada ◽

Makoto Konagai

Keyword(s):

Silicon Carbide ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

Nanocrystalline Silicon ◽

Hot Wire ◽

Nanocrystalline Silicon Carbide ◽

P Type