Impact of microcrystalline silicon carbide growth using hot-wire chemical vapor deposition on crystalline silicon surface passivation

2015 ◽  
Vol 595 ◽  
pp. 217-220 ◽  
Author(s):  
M. Pomaska ◽  
W. Beyer ◽  
E. Neumann ◽  
F. Finger ◽  
K. Ding
2011 ◽  
Vol 98 (15) ◽  
pp. 153514 ◽  
Author(s):  
Jan-Willem A. Schüttauf ◽  
Karine H. M. van der Werf ◽  
Inge M. Kielen ◽  
Wilfried G. J. H. M. van Sark ◽  
Jatindra K. Rath ◽  
...  

2016 ◽  
Vol 120 (22) ◽  
pp. 225105 ◽  
Author(s):  
Manuel Pomaska ◽  
Jan Mock ◽  
Florian Köhler ◽  
Uwe Zastrow ◽  
Martina Perani ◽  
...  

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