Role of oxygen and nitrogen in n-type microcrystalline silicon carbide grown by hot wire chemical vapor deposition

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

The role of hydrogen dilution of silane and phosphorus doping on hydrogenated microcrystalline silicon (μc-Si:H) films prepared by hot-wire chemical vapor deposition (HW-CVD) technique

Thin Solid Films ◽

10.1016/s0040-6090(01)01269-x ◽

2001 ◽

Vol 395 (1-2) ◽

pp. 206-212 ◽

Cited By ~ 23

Author(s):

S.R Jadkar ◽

J.V Sali ◽

M.G Takwale ◽

D.V Musale ◽

S.T Kshirsagar

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Phosphorus Doping ◽

Hydrogen Dilution

Highly transparent microcrystalline silicon carbide grown with hot wire chemical vapor deposition as window layers in n-i-p microcrystalline silicon solar cells

Applied Physics Letters ◽

10.1063/1.2739335 ◽

2007 ◽

Vol 90 (20) ◽

pp. 203502 ◽

Cited By ~ 34

Author(s):

Y. Huang ◽

A. Dasgupta ◽

A. Gordijn ◽

F. Finger ◽

R. Carius

Keyword(s):

Silicon Carbide ◽

Solar Cells ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

Hot-wire chemical vapor deposition prepared aluminum doped p-type microcrystalline silicon carbide window layers for thin film silicon solar cells

10.7567/jjap.53.05fm04 ◽

2014 ◽

Vol 53 (5S1) ◽

pp. 05FM04 ◽

Cited By ~ 7

Author(s):

Tao Chen ◽

Florian Köhler ◽

Anna Heidt ◽

Reinhard Carius ◽

Friedhelm Finger

Keyword(s):

Thin Film ◽

Silicon Carbide ◽

Solar Cells ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

P Type

Impact of microcrystalline silicon carbide growth using hot-wire chemical vapor deposition on crystalline silicon surface passivation

Thin Solid Films ◽

10.1016/j.tsf.2015.05.057 ◽

2015 ◽

Vol 595 ◽

pp. 217-220 ◽

Cited By ~ 11

Author(s):

M. Pomaska ◽

W. Beyer ◽

E. Neumann ◽

F. Finger ◽

K. Ding

Keyword(s):

Silicon Carbide ◽

Vapor Deposition ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Hot Wire ◽

Silicon Surface Passivation

Characterization of Undoped, N- and P-Type Hydrogenated Nanocrystalline Silicon Carbide Films Deposited by Hot-Wire Chemical Vapor Deposition at Low Temperatures

10.1143/jjap.46.1415 ◽

2007 ◽

Vol 46 (4A) ◽

pp. 1415-1426 ◽

Cited By ~ 46

Author(s):

Shinsuke Miyajima ◽

Akira Yamada ◽

Makoto Konagai

Keyword(s):

Silicon Carbide ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

Nanocrystalline Silicon ◽

Hot Wire ◽

Nanocrystalline Silicon Carbide ◽

P Type

Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-012-0934-z ◽

2012 ◽

Vol 24 (4) ◽

pp. 1361-1368 ◽

Cited By ~ 16

Author(s):

Fatemeh Shariatmadar Tehrani ◽

Boon Tong Goh ◽

Muhamad Rasat Muhamad ◽

Saadah Abdul Rahman

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Optical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Structural And Optical Properties

Hydrogen structures and the optoelectronic properties in transition films from amorphous to microcrystalline silicon prepared by hot-wire chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1555680 ◽

2003 ◽

Vol 93 (7) ◽

pp. 3776-3783 ◽

Cited By ~ 84

Author(s):

Daxing Han ◽

Keda Wang ◽

Jessica M. Owens ◽

Lynn Gedvilas ◽

Brent Nelson ◽

...

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Optoelectronic Properties ◽

Hot Wire ◽

Structure of Microcrystalline Silicon Carbide Films Prepared by Hydrogen-Radical-Enhanced Chemical Vapor Deposition in Magnetic Field

10.1143/jjap.33.4395 ◽

1994 ◽

Vol 33 (Part 1, No. 7B) ◽

pp. 4395-4399 ◽

Cited By ~ 5

Author(s):

Kanji Yasui ◽

Masayoshi Muramoto ◽

Tadashi Akahane

Keyword(s):

Magnetic Field ◽

Silicon Carbide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hydrogen Radical

Low Temperature Microcrystalline Silicon Solar Cells Prepared by Hot-Wire Chemical Vapor Deposition

2006 IEEE 4th World Conference on Photovoltaic Energy Conference ◽

10.1109/wcpec.2006.279800 ◽

2006 ◽

Cited By ~ 1

Author(s):

M.M. Adachi ◽

W.f.l. Tse ◽

K.S. Karim

Keyword(s):

Solar Cells ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

Fabrication of Microcrystalline Cubic Silicon Carbide/Crystalline Silicon Heterojunction Solar Cell by Hot Wire Chemical Vapor Deposition

10.1143/jjap.46.1 ◽

2007 ◽

Vol 46 (1) ◽

pp. 1-6 ◽

Cited By ~ 36

Author(s):

Chandan Banerjee ◽

Kannan Lakshmi Narayanan ◽

Keisuke Haga ◽

Jaran Sritharathikhun ◽

Shinsuke Miyajima ◽

...

Keyword(s):

Silicon Carbide ◽

Solar Cell ◽

Vapor Deposition ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Heterojunction Solar Cell ◽

Hot Wire ◽

Silicon Heterojunction Solar Cell ◽

Cubic Silicon Carbide