Influence of sputtering conditions on the properties of aluminum-doped zinc oxide thin film fabricated using a facing target sputtering system
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2014 ◽
Vol 53
(4S)
◽
pp. 04EJ07
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2017 ◽
Vol 12
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pp. S120-S124
2015 ◽
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2015 ◽
Vol 12
(9-11)
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pp. 1215-1219
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2013 ◽
Vol 52
(4S)
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pp. 04CF11
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