Study of the deposition parameters and Fe-dopant effect in the photocatalytic activity of TiO2 films prepared by dc reactive magnetron sputtering

Vacuum ◽  
2005 ◽  
Vol 78 (1) ◽  
pp. 37-46 ◽  
Author(s):  
J.O. Carneiro ◽  
V. Teixeira ◽  
A. Portinha ◽  
L. Dupák ◽  
A. Magalhães ◽  
...  
Keyword(s):  
Photocatalytic Activity ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Tio2 Films ◽  
Reactive Magnetron ◽  
Dopant Effect ◽  
Deposition Parameters ◽  
Dc Reactive Magnetron Sputtering

Photocatalytic Zn-doped TiO2 films prepared by DC reactive magnetron sputtering

Vacuum ◽  
2007 ◽  
Vol 82 (3) ◽  
pp. 328-335 ◽  
Author(s):  
Wenjie Zhang ◽  
Shenglong Zhu ◽  
Ying Li ◽  
Fuhui Wang
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Tio2 Films ◽  
Reactive Magnetron ◽  
Doped Tio2 ◽  
Dc Reactive Magnetron Sputtering

Yttrium-doped TiO2 films prepared by means of DC reactive magnetron sputtering

2009 ◽  
Vol 155 (1-2) ◽  
pp. 83-87 ◽  
Author(s):  
Wenjie Zhang ◽  
Kuanling Wang ◽  
Shenglong Zhu ◽  
Ying Li ◽  
Fuhui Wang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Tio2 Films ◽  
Reactive Magnetron ◽  
Doped Tio2 ◽  
Dc Reactive Magnetron Sputtering

Effect of deposition parameters on properties of TiO2 films deposited by reactive magnetron sputtering

2017 ◽  
Vol 43 (14) ◽  
pp. 10991-10998 ◽  
Author(s):  
Bo Wang ◽  
Shicheng Wei ◽  
Lei Guo ◽  
Yujiang Wang ◽  
Yi Liang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Tio2 Films ◽  
Reactive Magnetron ◽  
Deposition Parameters
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