Fluid modeling on effects of discharge parameters on ionization in capacitive radio frequency argon discharges at low pressure

Vacuum ◽  
2021 ◽  
pp. 110466
Author(s):  
Na Gao ◽  
Yan-Bin Xi ◽  
Jiang-Jiang Li ◽  
Yue Liu
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Fluid Modeling ◽  
Discharge Parameters

Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream

2017 ◽  
Vol 95 (2) ◽  
pp. 190-200 ◽  
Author(s):  
Murat Tanişli ◽  
İsmail Rafatov ◽  
Neslihan Şahin ◽  
Sercan Mertadam ◽  
Süleyman Demir
Keyword(s):  
Radio Frequency ◽  
Power Flow ◽  
Optical Emission Spectroscopy ◽  
Fluid Model ◽  
Optical Emission ◽  
Low Pressure ◽  
Spectral Lines ◽  
Rf Power ◽  
Plasma Parameters ◽  
Discharge Parameters

In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy (OES). The wavelengths of spectral lines from OES are obtained between 650–900 nm. Using OES lines and related experimental data, the electron temperatures for different RF power, flow, and measurement periods are determined. Eventually, the properties of plasma including the electron temperature are identified. In addition, the numerical modelling of the discharge parameters is carried out by using the “extended” fluid model for plasma, and consistency between numerical and experimental results is discussed.

Increasing the capillary of fiberglass under the application of a relief coating in the low-pressure radio-frequency induction discharge

2019 ◽  
Vol 1328 ◽  
pp. 012069
Author(s):  
E A Skidchenko ◽  
E F Voznesensky ◽  
V A Sysoev ◽  
G G Lutfullina ◽  
A E Karnouhov ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Induction Discharge

Experimental Investigation on Electromagnetic Attenuation by Low Pressure Radio-Frequency Plasma for Cavity Structure

2016 ◽  
Vol 18 (1) ◽  
pp. 62-66 ◽  
Author(s):  
Xiang He ◽  
Yachun Zhang ◽  
Jianping Chen ◽  
Yudong Chen ◽  
Xiaojun Zeng ◽  
...  
Keyword(s):  
Experimental Investigation ◽  
Radio Frequency ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Cavity Structure

scholarly journals Self-excited instability occurring during the nanoparticle formation in an Ar–SiH4 low pressure radio frequency plasma

2006 ◽  
Vol 99 (6) ◽  
pp. 064301 ◽  
Author(s):  
M. Cavarroc ◽  
M. C. Jouanny ◽  
K. Radouane ◽  
M. Mikikian ◽  
L. Boufendi
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Radio Frequency Plasma ◽  
Nanoparticle Formation ◽  
Frequency Plasma
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