Development of titanium nitride thin film microheaters using laser micromachining

This article considers the research results of the effect of stoichiometry on the properties of titanium nitride thin-film coatings of the float and electrostatic gyroscopes. It presents the results of tests of such mechanical and optical characteristics of titanium nitride thin-film structures as microhardness, resistance to wear and friction, and image contrast determined by the reflection coefficients of a titanium nitride base surface and a raster pattern formed by local laser oxidation. When making a rotor of a cryogenic gyroscope, the prospects of use and technological methods for the formation of functional surface structures of niobium carbide and nitride are considered. It is shown that during the formation of coatings of the required composition, the most important is the thermodynamic estimation of possible interactions. These interactions allow us to accomplish the structural-phase modification of the material, which is determined by the complex of possible topochemical reactions leading to the formation of compounds, including non-stoichiometric composition.

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Titanium Nitride Thin Film Based Low-Redox-Interference Potentiometric pH Sensing Electrodes

Sensors ◽

10.3390/s21010042 ◽

2020 ◽

Vol 21 (1) ◽

pp. 42

Author(s):

Shimrith Paul Shylendra ◽

Wade Lonsdale ◽

Magdalena Wajrak ◽

Mohammad Nur-E-Alam ◽

Kamal Alameh

Keyword(s):

Thin Film ◽

Titanium Nitride ◽

Orange Juice ◽

Ph Sensor ◽

Reference Electrode ◽

Cost Effective ◽

Ph Sensing ◽

Ph Sensors ◽

Potential Shift ◽

Double Junction

In this work, a solid-state potentiometric pH sensor is designed by incorporating a thin film of Radio Frequency Magnetron Sputtered (RFMS) Titanium Nitride (TiN) working electrode and a commercial Ag|AgCl|KCl double junction reference electrode. The sensor shows a linear pH slope of −59.1 mV/pH, R2 = 0.9997, a hysteresis as low as 1.2 mV, and drift below 3.9 mV/h. In addition, the redox interference performance of TiN electrodes is compared with that of Iridium Oxide (IrO2) counterparts. Experimental results show −32 mV potential shift (E0 value) in 1 mM ascorbic acid (reducing agent) for TiN electrodes, and this is significantly lower than the −114 mV potential shift of IrO2 electrodes with sub-Nernstian sensitivity. These results are most encouraging and pave the way towards the development of miniaturized, cost-effective, and robust pH sensors for difficult matrices, such as wine and fresh orange juice.

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Fracture Toughness of Titanium - Titanium Nitride Multi-Layer Thin Film

Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems ◽

10.1115/detc2008-49821 ◽

2008 ◽

Author(s):

Mohan Prasad Manoharan ◽

Amit Desai ◽

Amanul Haque

Keyword(s):

Thin Film ◽

Fracture Toughness ◽

Titanium Nitride ◽

Focused Ion Beam ◽

Ion Beam ◽

New Class ◽

Tin Coatings ◽

Film Specimen ◽

Cantilever Bending ◽

Layer Thin Film

Thin film specimens of titanium - titanium nitride multilayer erosion resistant coating were prepared using liftout technique in Focused Ion Beam - Scanning Electron Microscope (SEM). The fracture toughness of the thin film specimen was measured in situ using a cantilever bending experiment in SEM to be 11.33 MPa/m0.5, twice as much as conventional TiN coatings. Ti–TiN multi-layer coatings are part of a new class of advanced erosion resistant coatings and this paper discusses an experimental technique to measure the fracture toughness of these coatings.

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