Study on silicon melt convection during the RF-FZ crystal growth process

1999 ◽  
Vol 206 (1-2) ◽  
pp. 27-36 ◽  
Author(s):  
Tetsuo Munakata ◽  
Ichiro Tanasawa
Keyword(s):  
Crystal Growth ◽  
Growth Process ◽  
Crystal Growth Process ◽  
Silicon Melt ◽  
Melt Convection

scholarly journals Numerical Simulation of the Effect of Heater Position on the Oxygen Concentration in the CZ Silicon Crystal Growth Process

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
Ying-Yang Teng ◽  
Jyh-Chen Chen ◽  
Chung-Wei Lu ◽  
Cheng-Chuan Huang ◽  
Wan-Ting Wun ◽  
...  
Keyword(s):  
Crystal Growth ◽  
Oxygen Concentration ◽  
Concentration Distribution ◽  
Growth Process ◽  
Silicon Crystal ◽  
Crucible Wall ◽  
Crystal Growth Process ◽  
Silicon Melt ◽  
Average Oxygen Concentration ◽  
Crystal Interface

We perform numerical simulations to analyze the effect of the position of the heater on the thermal and flow fields and the oxygen concentration distribution during the industrial Cz silicon crystal growth process. The amount of oxygen released from the silica crucible to the silicon melt during the growth process can be lowered by adjusting the heater position to decrease the temperature on the crucible wall. During growth of the crystal body, there is a significant decrease in the gradient of the oxygen concentration along the melt-crystal interface due to the stronger Taylor-Proudman vortex, which is generated by the crucible and crystal rotation. There is a significant reduction in the average oxygen concentration at the melt-crystal interface for longer crystal lengths because of the lower wall temperature, smaller contact surface between the crucible wall and the melt and the stronger Taylor-Proudman vortex.

Experimental Verification of the Numerical Model for a CaF2 Crystal Growth Process

2002 ◽  
Vol 37 (1) ◽  
pp. 77-82 ◽  
Author(s):  
A. Molchanov ◽  
U. Hilburger ◽  
J. Friedrich ◽  
M. Finkbeiner ◽  
G. Wehrhan ◽  
...  
Keyword(s):  
Crystal Growth ◽  
Numerical Model ◽  
Experimental Verification ◽  
Growth Process ◽  
Caf2 Crystal ◽  
Crystal Growth Process

Purification of organic compounds in high-quality crystal growth process

2000 ◽  
Vol 66 (2-3) ◽  
pp. 303-308 ◽  
Author(s):  
C Salati ◽  
G Mignoni ◽  
M Zha ◽  
L Zanotti ◽  
C Mucchino ◽  
...  
Keyword(s):  
Crystal Growth ◽  
Organic Compounds ◽  
Growth Process ◽  
High Quality ◽  
Crystal Growth Process

Coupling of conductive, convective and radiative heat transfer in Czochralski crystal growth process

2002 ◽  
Vol 25 (4) ◽  
pp. 570-576 ◽  
Author(s):  
Andrzej J Nowak ◽  
Ryszard A Białecki ◽  
Adam Fic ◽  
Gabriel Wecel ◽  
Luiz C Wrobel ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Crystal Growth ◽  
Radiative Heat Transfer ◽  
Growth Process ◽  
Radiative Heat ◽  
Czochralski Crystal Growth ◽  
Crystal Growth Process
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