Deposition and characterization of amorphous and micro-crystalline Si,C alloy thin films by a remote plasma-enhanced chemical-vapor deposition process - RPECVD

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(05)80227-3 ◽

1991 ◽

Vol 137-138 ◽

pp. 741-744 ◽

Author(s):

C. Wang ◽

G. Lucovsky ◽

R.J. Nemanich

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Remote Plasma ◽

Vapor Deposition Process

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Characterization of Surface Metal Particulate Contamination Using the Polysilicon Chemical Vapor Deposition Process

Particles on Surfaces 3 ◽

10.1007/978-1-4899-2367-7_12 ◽

1991 ◽

pp. 143-152 ◽

Author(s):

William A. Syverson ◽

Paul J. Schubring

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Particulate Contamination ◽

Surface Metal ◽

Vapor Deposition Process

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Coating of TiO2 thin films on particles by a plasma chemical vapor deposition process

Advanced Powder Technology ◽

10.1016/j.apt.2009.12.014 ◽

2010 ◽

Vol 21 (2) ◽

pp. 136-140 ◽

Author(s):

Dong-Joo Kim ◽

Jin-Yi Kang ◽

Kyo-Seon Kim

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Plasma Chemical ◽

Tio2 Thin Films ◽

Plasma Chemical Vapor Deposition ◽

Vapor Deposition Process

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Characteristics of ferroelectric Sr0.7Bi2.1Ta2.0O9 thin films grown by liquid delivery metal organic chemical vapor deposition process

Thin Solid Films ◽

10.1016/j.tsf.2005.07.115 ◽

2005 ◽

Vol 492 (1-2) ◽

pp. 140-145 ◽

Author(s):

Byong-Ho Kim ◽

Dong-Kyun Kang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Vapor Deposition Process

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OPTIMIZATION OF THE CHEMICAL VAPOR DEPOSITION PROCESS FOR THE FABRICATION OF THIN FILMS

Equipment ◽

10.1615/ihtc13.p11.60 ◽

2006 ◽

Author(s):

P. George ◽

Yogesh Jaluria ◽

H. C. Gea

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Analysis of mass transport in an atmospheric pressure remote plasma-enhanced chemical vapor deposition process

Journal of Applied Physics ◽

10.1063/1.3294966 ◽

2010 ◽

Vol 107 (2) ◽

pp. 024909 ◽

Author(s):

R. P. Cardoso ◽

T. Belmonte ◽

G. Henrion ◽

T. Gries ◽

E. Tixhon

Keyword(s):

Chemical Vapor Deposition ◽

Mass Transport ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Remote Plasma ◽

Vapor Deposition Process

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Conformal, Conducting Poly(3,4-ethylenedioxythiophene) Thin Films Deposited Using Bromine as the Oxidant in a Completely Dry Oxidative Chemical Vapor Deposition Process

Chemistry of Materials ◽

10.1021/cm100092c ◽

2010 ◽

Vol 22 (9) ◽

pp. 2864-2868 ◽

Author(s):

Hitesh Chelawat ◽

Sreeram Vaddiraju ◽

Karen Gleason

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Characterization of the polyurea polymeric waveguides fabricated using the chemical vapor deposition process

Optics & Laser Technology ◽

10.1016/j.optlastec.2007.09.006 ◽

2008 ◽

Vol 40 (4) ◽

pp. 607-613

Author(s):

Shug-June Hwang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Preparation of nanoparticle-embedded thin films by simultaneous feeding of gaseous and solid raw materials in plasma-enhanced chemical vapor deposition process

Thin Solid Films ◽

10.1016/j.tsf.2017.04.042 ◽

2017 ◽

Vol 632 ◽

pp. 55-65 ◽

Author(s):

Masaru Kubo ◽

Tomoya Taguchi ◽

Manabu Shimada

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Raw Materials ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Perspective: Highly ordered MoS2 thin films grown by multi-step chemical vapor deposition process

APL Materials ◽

10.1063/1.4943288 ◽

2016 ◽

Vol 4 (3) ◽

pp. 030901 ◽

Author(s):

S. N. Heo ◽

Y. Ishiguro ◽

R. Hayakawa ◽

T. Chikyow ◽

Y. Wakayama

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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One-step fabrication of high quality double-walled carbon nanotube thin films by a chemical vapor deposition process

Carbon ◽

10.1016/j.carbon.2010.06.046 ◽

2010 ◽

Vol 48 (13) ◽

pp. 3817-3824 ◽

Author(s):

Jian-Min Feng ◽

Rui Wang ◽

Ya-Li Li ◽

Xiao-Hua Zhong ◽

Lan Cui ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

High Quality ◽

One Step ◽

Vapor Deposition Process

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