High deposition rates for microcrystalline silicon with low temperature plasma enhanced chemical vapor deposition processes

1998 ◽  
Vol 227-230 ◽  
pp. 861-865 ◽  
Author(s):  
P Hapke ◽  
F Finger
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Temperature Plasma ◽  
Microcrystalline Silicon ◽  
Temperature Plasma ◽  
Deposition Rates ◽  
Deposition Processes

Low-Temperature Plasma-Enahanced Chemical Vapor Deposition of Crystal Silicon Film from Dichlorosilane

2001 ◽  
Vol 40 (Part 1, No. 1) ◽  
pp. 44-48 ◽  
Author(s):  
Haiping Liu ◽  
Sughoan Jung ◽  
Yukihiro Fujimura ◽  
Chisato Fukai ◽  
Hajime Shirai ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Silicon Film ◽  
Chemical Vapor ◽  
Low Temperature Plasma ◽  
Crystal Silicon ◽  
Temperature Plasma
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