Effect of irradiation ion species on internal stress in boron thin films

1997 ◽  
Vol 241-243 (1) ◽  
pp. 1138-1141 ◽  
Author(s):  
N Satomi
Keyword(s):  
Thin Films ◽  
Internal Stress ◽  
Ion Species

Effect of irradiation ion species on internal stress in boron thin films

1997 ◽  
Vol 241-243 ◽  
pp. 1138-1141 ◽  
Author(s):  
N. Satomi ◽  
K. Tanak ◽  
M. Kitamura ◽  
M. Nishikawa
Keyword(s):  
Thin Films ◽  
Internal Stress ◽  
Ion Species

Internal Stress Change of Phosphorus-Doped Amorphous Silicon Thin Films During Crystallization

1994 ◽  
Vol 343 ◽  
Author(s):  
Hideo Miura ◽  
Asao Nishimura
Keyword(s):  
Thin Films ◽  
Tensile Stress ◽  
Internal Stress ◽  
Crystallization Process ◽  
Chemical Vapor ◽  
Stress Change ◽  
Silicon Thin Films ◽  
Stress Changes ◽  
Phosphorus Doped ◽  
Deposited Films

ABSTRACTInternal stress change of phosphorus-doped silicon thin films during crystallization is measured by detecting substrate curvature change using a scanning laser microscope. The films are deposited in an amorphous phase by chemical vapor deposition using Si2H6 gas. The deposited films have compressive stress of about 200 MPa. The internal stress changes significantly to a tensile stress of about 800 MPa at about 600 °C due to shrinkage of the films during crystallization. The high tensile stress can be relaxed by annealing above 800 °C. The phosphorus doping changes the crystallization process of the films and their final residual stress.

scholarly journals High Temperature Thermo-Mechanical Properties of Praseodymium Doped Ceria Thin Films Measured Two Ways

2022 ◽  
Author(s):  
Yuxi Ma ◽  
Quan Zhou ◽  
Jason D. Nicholas
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
High Temperature ◽  
Temperature Dependence ◽  
Internal Stress ◽  
Expansion Coefficient ◽  
Mechanical Stability ◽  
Doped Ceria ◽  
Stress Strain ◽  
Chemical Expansion

The temperature dependence of a Mixed Ionic Electronic Conducting (MIEC) material’s thermo-chemical expansion coefficient, biaxial modulus, and/or Young’s modulus are crucial in determining the internal stress, strain, and/or mechanical stability...

Role of internal stress on room-temperature permittivity of BaTiO3 ceramics and thin films

2004 ◽  
Vol 95 (1) ◽  
pp. 219-225 ◽  
Author(s):  
Jung-Kun Lee ◽  
Young Hyun Lee ◽  
Kug Sun Hong ◽  
Jin-Wook Jang
Keyword(s):  
Thin Films ◽  
Internal Stress ◽  
Room Temperature

scholarly journals Ion Bombardment Effects on Internal Stress of Magnetic Thin Films

2010 ◽  
Vol 74 (9) ◽  
pp. 610-613 ◽  
Author(s):  
Yoshiaki Shinohara ◽  
Koji Makita ◽  
Yoshihito Matsumura
Keyword(s):  
Thin Films ◽  
Internal Stress ◽  
Ion Bombardment ◽  
Magnetic Thin Films

Evaluation of Stoney equation for determining the internal stress of DLC thin films using an optical profiler

2016 ◽  
Vol 308 ◽  
pp. 98-100 ◽  
Author(s):  
Sheida Shiri ◽  
Parisa Ashtijoo ◽  
Akindele Odeshi ◽  
Qiaoqin Yang
Keyword(s):  
Thin Films ◽  
Internal Stress

Post-deposition reduction of internal stress in thin films: The case of HfN coatings bombarded with Au ions

1997 ◽  
Vol 33 (1-2) ◽  
pp. 31-36 ◽  
Author(s):  
R. Nowak ◽  
Y. Miyagawa ◽  
C.L. Li ◽  
S. Nakao ◽  
S. Maruno ◽  
...  
Keyword(s):  
Thin Films ◽  
Internal Stress ◽  
Post Deposition

scholarly journals Role of Internal Stress in Whisker Growth of Electrodeposited Tin Thin Films

2011 ◽  
Vol 60 (8) ◽  
pp. 735-741
Author(s):  
Hiromi UENO ◽  
Keisuke TANAKA ◽  
Hirohisa KIMACHI ◽  
Daisuke SHIMADA
Keyword(s):  
Thin Films ◽  
Internal Stress ◽  
Whisker Growth ◽  
Tin Thin Films

scholarly journals Stress Analysis of Transistor Structures Considering the Internal Stress of Thin Films

1996 ◽  
Vol 39 (2) ◽  
pp. 166-171 ◽  
Author(s):  
Hideo MIURA ◽  
Norio ISHITSUKA ◽  
Naoto SAITO ◽  
Hiroyuki OHTA ◽  
Chiemi HASHIMOTO ◽  
...  
Keyword(s):  
Thin Films ◽  
Stress Analysis ◽  
Internal Stress
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