Ohmic contact characterization of AlGaN/GaN device layers with spatially localized LEEN spectroscopy

2002 ◽  
Vol 46 (9) ◽  
pp. 1427-1431 ◽  
Author(s):  
G.H Jessen ◽  
B.D White ◽  
S.T Bradley ◽  
P.E Smith ◽  
L.J Brillson ◽  
...  
Keyword(s):  
Author(s):  
A.K. Rai ◽  
A.K. Petford-Long ◽  
A. Ezis ◽  
D.W. Langer

Considerable amount of work has been done in studying the relationship between the contact resistance and the microstructure of the Au-Ge-Ni based ohmic contacts to n-GaAs. It has been found that the lower contact resistivity is due to the presence of Ge rich and Au free regions (good contact area) in contact with GaAs. Thus in order to obtain an ohmic contact with lower contact resistance one should obtain a uniformly alloyed region of good contact areas almost everywhere. This can possibly be accomplished by utilizing various alloying schemes. In this work microstructural characterization, employing TEM techniques, of the sequentially deposited Au-Ge-Ni based ohmic contact to the MODFET device is presented.The substrate used in the present work consists of 1 μm thick buffer layer of GaAs grown on a semi-insulating GaAs substrate followed by a 25 Å spacer layer of undoped AlGaAs.


2010 ◽  
Vol 654-656 ◽  
pp. 1178-1181
Author(s):  
Hui Feng Li ◽  
Yun Hua Huang ◽  
Xiu Jun Xing ◽  
Jia Su ◽  
Yue Zhang

The electrical properties of single ZnO nanowire were researched in the chamber of a scanning electron microscope under high-vacuum conditions using nanomanipulator and measurement system. The result shows that ZnO nanowire resistivity was about 1.4 Ω•cm with Ohmic contact. The local change of electron density induced by Shottky contacts or Ohmic contact with tip and semiconductor/metal materials significantly affects the current transport through the nanowire. Single ZnO nanowire was configured as field effect transistors (FET) and based on metal tantalum (Ta) as electrodes show a pronounced n-type gate modulation with an electron concentration of ~1.0×1019 cm−3 and an electron mobility of ~52 cm2 /V s at a bias voltage of 1 V.


2007 ◽  
Vol 51 (7) ◽  
pp. 1073-1078 ◽  
Author(s):  
Kuang-Po Hsueh ◽  
Yue-Ming Hsin ◽  
Jinn-Kong Sheu ◽  
Wei-Chih Lai ◽  
Chun-Ju Tun ◽  
...  

ChemInform ◽  
1990 ◽  
Vol 21 (19) ◽  
Author(s):  
R. P. GUPTA ◽  
W. S. KHOKLE ◽  
J. WUERFL ◽  
H. L. HARTNAGEL

2011 ◽  
Vol 257 (24) ◽  
pp. 10737-10742 ◽  
Author(s):  
M. Siad ◽  
M. Abdesselam ◽  
N. Souami ◽  
A.C. Chami

1993 ◽  
Vol 11 (5) ◽  
pp. 2536-2542 ◽  
Author(s):  
A. Campo ◽  
Ch. Cardinaud ◽  
G. Turban ◽  
C. Dubon‐Chevallier ◽  
V. Amarger ◽  
...  

1994 ◽  
Vol 343 ◽  
Author(s):  
Jaeshin Cho ◽  
N. David Theodore

ABSTRACTThe electrical resistivity and microstructure of sputtered germanium film were characterized as a function of anneal temperature from 400 to 700°C. The as-deposited sputtered Ge film had an amorphous structure with resistivity of 165 Ω-cm which was maintained after annealing up to 540°C. After annealing above 550°C, the resistivity dropped by almost four orders of magnitude to ∼0.027 Ω-cm. The sharp transition of resistivity at 550°C is believed to be due to the recrystallization of Ge film from the as-deposited amorphous structure. The ohmic contact property on Ge films was also evaluated using sputtered tungsten. Low resistance ohmic contacts were obtained both on as-deposited and annealed Ge films, with typical ohmic contact resistance of 0.05 ± 0.008 Ω-mm on annealed Ge films. The W contacts were thermally stable after annealing up to 650°C.


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