Low-temperature growth of in situ phosphorus-doped silicon films: two-step growth utilizing amorphous silicon buffers
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2018 ◽
Vol 47
(8)
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pp. 4710-4720
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1995 ◽
Vol 61
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pp. 829-833
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Vol 40
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pp. L1207-L1210
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Vol 265
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pp. 425-433
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Vol 36
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pp. 3714-3720
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Vol 20
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pp. 1879-1882
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2002 ◽
Vol 74
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pp. 421-427
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