Low-temperature growth of in situ phosphorus-doped silicon films: two-step growth utilizing amorphous silicon buffers

2000 ◽  
Vol 369 (1-2) ◽  
pp. 185-188
Author(s):  
Kyu-Hwan Shim ◽  
Hong-Seung Kim ◽  
Jeong-Yong Lee ◽  
Jin-Yeoung Kang ◽  
Min Kyu Song
1995 ◽  
Vol 61 (6) ◽  
pp. 829-833
Author(s):  
Hiroaki KAKIUCHI ◽  
Hideaki KAWABE ◽  
Kumayasu YOSHII ◽  
Kiyoshi YASUTAKE ◽  
Akihiro TAKEUCHI ◽  
...  

2019 ◽  
Vol 125 (6) ◽  
Author(s):  
Ligang Ma ◽  
Xiaoqian Ai ◽  
Yuzheng Lu ◽  
Senlin Yan ◽  
X. S. Wu

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